可见光和近红外双带通薄膜滤光片的光谱调控研究
投稿时间:2020-01-19  修订日期:2020-03-04  点此下载全文
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作者单位E-mail
陈刚 上海技术物理研究所 gangchen@mail.sitp.ac.cn 
刘定权 上海技术物理研究所 dqliu@mail.sitp.ac.cn 
中文摘要:空间对地观测的遥感相机中需要基于干涉薄膜的双光谱通道滤光片,在同一几何点上同时形成可见光(波长500~720 nm)和近红外(波长1064±1 nm)两个光谱通道。这两个光谱通道的光谱位置和透射强度均需要进行精确控制。本文选用JGS-1石英玻璃作为滤光片基片,氧化钽(Ta2O5)和氧化硅(SiO2)分别作为高、低折射率薄膜,由双离子束溅射沉积方法将52层和88层介质薄膜分别镀制在基片的两个表面上。500~720 nm波段的平均透过率达到92%,1064±1 nm 波段的峰值透过率控制在26±1%的范围。
中文关键词:光学薄膜  双光谱通道滤光片  离子束溅射沉积  光谱控制
 
SPECTRUM MODULATION RESEARCH OF A THIN-FILM FILTER WITH VISIBLE AND NEAR INFRARED DUAL BAND-PASS CHANEL
Abstract:A remote sensing camera needs a thin-film filter with visible (wavelength 500~720 nm) and near infrared (wavelength 1064±1 nm) dual band-pass spectrum channels at any same geometric position. The spectrum and transparence of the two channels need be modulated accurately. JGS-1 fused quartz used as the substrate, and Ta2O5 and SiO2 thin film used as high (H) and low (L) reflective index layers respectively. 52 and 88 layers deposited on the two surfaces of substrate by dual ion beam sputtering method. The average transparence of 500~720 nm band reaches 92% and the peak transparence of 1064±1 nm band controlled in 26±1% range.
keywords:optical thin film  dual spectrum channel filter  ion beam sputtering deposition  spectrum modulation
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