一种二极管型红外热探测器热学参数的电学等效测试方法
投稿时间:2019-03-30  修订日期:2019-09-12  点此下载全文
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作者单位邮编
LIU Chao Integrated Circuit Advanced Process R&D Center, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China
University of Chinese Academy of Sciences, Beijing 100049, China 
100049
HOU Ying Integrated Circuit Advanced Process R&D Center, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China
Wuxi Innovation Center for Internet of Things, Wuxi 214028China 
FU Jian-Yu Integrated Circuit Advanced Process R&D Center, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China
University of Chinese Academy of Sciences, Beijing 100049, China
Wuxi Innovation Center for Internet of Things, Wuxi 214028China 
LIU Rui-Wen Integrated Circuit Advanced Process R&D Center, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China 
WEI De-Bo Integrated Circuit Advanced Process R&D Center, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China
University of Chinese Academy of Sciences, Beijing 100049, China 
CHEN Da-Peng Integrated Circuit Advanced Process R&D Center, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China
University of Chinese Academy of Sciences, Beijing 100049, China
Wuxi Innovation Center for Internet of Things, Wuxi 214028China 
基金项目:国家自然科学基金 61601455 61874137;北京市科委重点研发计划 Z191100010618005国家自然科学基金(61601455, 61874137),北京市科委重点研发计划(Z191100010618005)
中文摘要:红外热探测器的热学参数包括热容、热导、热响应时间,反应了结构信息和器件性能。精确有效地获得这些参数,对探测器的结构优化与性能评估具有指导意义。二极管型红外热探测器是红外热探测器的主要类型之一。基于二极管型红外热探测器的自热效应,提出了一种热学参数的电学等效测试方法,具有测量精度高且实现简单的特点。并对自制的一款二极管型红外焦平面阵列像元进行了测试,测试结果与理论分析相符,验证了方法的可行性。
中文关键词:红外热探测器  二极管  电学等效测试  热学参数
 
An electrical equivalent test method for thermal parameters of a diode type infrared thermal detector
Abstract:Thermal parameters of infrared thermal detector include thermal capacity, thermal conductance and thermal response time, reflecting the structure information and performance of detector. Accurate and effective measurement of these thermal parameters is important for device performance evaluation and optimization. A diode-type infrared detector is an important infrared detector. Based on the self-heating effect of diode-type infrared heat detectors, an equivalent electrical test method was developed. The method has the advantages of high precision and easy implementation. The pixel of the self-made diode-type infrared focal plane array was tested by this method. The results were in good agreement with the theoretical analysis, and the feasibility of the method was verified.
keywords:infrared thermal detector  diode  electrical equivalent test  thermal parameters
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