过冷度对液相外延HgCdTe薄膜厚度均匀性的影响
投稿时间:2018-11-05  修订日期:2018-12-07  点此下载全文
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作者单位E-mail
陆骏 昆明物理研究所 ricardo693@163.com 
李东升 昆明物理研究所 li_d_s@163.com 
吴军 昆明物理研究所  
万志远 昆明物理研究所  
宋林伟 昆明物理研究所  
李沛 昆明物理研究所  
张阳 昆明物理研究所  
孔金丞 昆明物理研究所  
中文摘要:探索了一种准确测量过冷度的实验方法,并在此基础上,利用光学显微镜、傅里叶红外透射光谱仪、台阶仪、白光干涉仪等测试手段分析了过冷度对HgCdTe薄膜厚度均匀性的影响。研究结果表明,过冷度小于2 ℃,薄膜容易出现中心凹陷、四周凸起的现象;过冷度大于3 ℃,薄膜中心将会明显凸起,出现宽度为毫米级的周期性起伏,并伴随有crosshatch线产生。当过冷度为2.5 ℃时,薄膜厚度极差可缩小至0.5 μm,0.5×0.5 mm2范围内薄膜相对于衬底的粗糙度增加量为9.07 nm。
中文关键词:碲镉汞  过冷度  厚度均匀性  液相外延
 
Influence of supercooling on the thickness uniformity of HgCdTe film grown by LPE
Abstract:In this paper, a method to accurately measure supercooling of HgCdTe film grown by LPE has been proposed. Influence of supercooling on the thickness uniformity of HgCdTe film has been studied by combining with optical Microscope, Fourier transform infrared (FTIR), step profiler and White-light Interferometer (WLI). Result shown that, thickness in the center of a 20 mm × 25 mm film decreased when supercooling is less than 2 ℃, while it is increased significantly when supercooling is more than 3 ℃, attached with cross-hatch pattern on micrograph. Thickness variation of a 20mm × 25mm film could be less than 0.5 μm, and surface roughness is comparable with CZT substrate when supercooling is around 2.5 ℃.
keywords:cadmium mercury tellurium,supercooling,thickness uniformity,LPE
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