双层复合纳米森林结构的制备及其宽光谱高吸收光学特性研究
投稿时间:2017-09-18  修订日期:2017-12-04  点此下载全文
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作者单位E-mail
杨宇东 中北大学 yangyudong_work@163.com 
毛海央 中国科学院微电子研究所 maohaiyang@ime.ac.cn 
李锐锐 中北大学  
贾云丛 中国科学院微电子研究所  
熊继军 中北大学 xiongjijun@nuc.edu.cn 
王玮冰 中国科学院微电子研究所  
基金项目:国家高技术研究发展计划(863计划),国家自然科学基金项目(面上项目,重点项目,重大项目)
中文摘要:本文基于等离子体再聚合技术制备了纳米纤维-纳米锥双层森林结构,并通过磁控溅射工艺在结构表面引入金属纳米颗粒实现了双层复合纳米森林结构,工艺流程简单便捷,与常规微纳加工工艺兼容性好,易于实现大面积的并行加工。此外,本文将纳米森林的陷光效应和金属纳米颗粒的表面等离激元效应相结合,对双层复合纳米森林结构的光吸收特性进行深入研究与探索,最终实现了该复合纳米森林结构在1.5-25 um 波长范围内84.1%的平均吸收率。具有宽光谱高吸收光学特性的双层复合纳米森林结构有望在提高红外器件性能和拓展器件应用等方面获得广泛应用。
中文关键词:等离子体再聚合  纳米森林结构  表面等离激元  宽光谱高吸收
 
Fabrication and broadband high absorption features of double-layer hybrid nanoforests
Abstract:In this work, nanowire-nanocone double-layer nanoforests are prepared based on a plasma repolymerization technique, and then double-layer hybrid nanoforests are realized by introducing noble metal-nanoparticles on surface of the nanoforests using a magnetron sputtering step. The entire process is simple and fully compatible with conventional micro-fabrication, besides, it is a parallel technique, thus large area fabrication of the hybrid nanoforests is easy to achieve. Moreover, such a hybrid nanoforest is able to combine light trapping effect and surface plasmonic effect thus to achieve an average absorption as high as 84.1% in a broad wavelength range of 1.5-25 um. With such a broadband high absorption property, the double-layer hybrid nanoforests are expected to be widely used to improve performance of infrared devices, and to expand applications of such devices.
keywords:Plasma repolymerization  Nanoforests  Surface plasmon  Broadband high absorption
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