(英)一种高集成、高空间分辨率的220GHz检波器
投稿时间:2017-05-12  最后修改时间:2017-07-07  点此下载全文
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作者单位E-mail
崔大圣 北京理工大学 dscui@bit.edu.cn 
基金项目:国家自然科学基金项目(面上项目,重点项目,重大项目)
中文摘要:本文设计了一种高集成检波器,其包含贴片天线、匹配电路、肖特基二极管和透镜。在中芯国际130nm工艺下将天线、匹配电路、肖特基二极管集成到一个芯片上,检波器的集成度相比于分离式有了明显的提高。为增强片上天线的方向性,进行了带有空气腔的尼龙透镜的设计和优化。透镜上的空气腔不但提供了组装空间而且减小了透镜体积。通过测试,天线在220 GHz辐射增益为22 dB,其中透镜贡献约为20dB。检波器测试得到的响应率可达到130-150V/W,对应的等效噪声功率(NEP)估算为400-460 。
中文关键词:太赫兹(THz)检波器,互补金属氧化物半导体工艺,肖特基二极管,透镜天线
 
A 220-GHz high integration and high resolution detector
Abstract:A high integration detector has been developed, which consists of patch antenna, matching circuit, schottky diode (SBD) and lenses. The integration of detectors is increase obviously compared with separated detector by integrate antenna, matching circuit and SBD on a chip in SMIC 130mm. To improve the directivity of the antenna on chip, the nylon lens with air cave is designed and optimized. The air cave in lens not only provide space for assembling but also reduce the size of lens. The antenna gain at 220 GHz is calculated to be 22dB, in which the contribution of lens is about 20dB. The measured responsivity of the detector could achieve 130-150 V/W at 220GHz and the noise equivalent power (NEP) is estimated to be 400-460 .
keywords:Terahertz detector, CMOS, Schottky diode, lens antenna
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