高功率高光束质量980nm垂直腔底面发射激光器
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国家自然科学基金项目(面上项目,重点项目,重大项目)


HIGH POWER AND HIGN BEAM QUALITY 980nm BOTTOM-EMITTING VERTICAL-CAVITYSURFACE-EMITTING LASER
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    摘要:

    报道了优化p面电极的高功率高光束质量980nm垂直腔底面发射激光器(VCSEL).采用数学模型对VCSEL的电流密度进行了模拟计算,发现电流密度分布由氧化孔直径和p面电极直径决定.确定氧化孔直径后,优化p面电极直径可以实现电流密度的均匀分布,抑制远场光斑中高阶边模的产生.将p面电极直径优化为580μm,制作的600μm的VCSEL远场发散角从30°减小到15°,优化器件的阈值电流和最高输出功率都略有增加.通过改进器件封装方式后,器件输出功率达到2.01W,激射波长为982.6nm.

    Abstract:

    A highpower and high beam quality 980nm bottomemitting verticalcavity surfaceemitting laser (VCSEL) with optimized pcontact aperture was reported. A numerical simulation of current density in a large aperture bottomemitting VCSEL with oxidation between the active region and the top ptype mirror was conducted. It is found that the simulated current density profiles of VCSEL are dependent on the oxide aperture diameter and the pcontact diameter. For a fixed oxide aperture diameter, the homogeneous current density of the VCSEL could be realized by optimizing the pcontact diameter. Thus, the edge mode in farfield patterns was suppressed. The farfield divergence angle from a 600 μm diameter VCSEL was suppressed from more than 30° to 15° and no strong sidelobe was observed in farfield pattern when the pcontact diameter decreased from 650 μm to 580 μm. There is a slight rise both in threshold current and optical output power due to the pcontact optimization. The VCSEL device produces the maximum optical output power of 2.01 W with lasing wavelength of 982.6nm by improving the device packaging method.

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张岩,宁永强,王烨,刘光裕,张星,王贞福,史晶晶,王伟,张立森,秦莉,孙艳芳,刘云,王立军.高功率高光束质量980nm垂直腔底面发射激光器[J].红外与毫米波学报,2010,29(5):329~332]. ZHANG Yan, NING Yong-Qiang, WANG Ye, LIU Guang-Yu, ZHANG Xing, WANG Zhen-Fu, SHI Jing-Jing, WANG Wei, ZHANG Li-Sen, QIN Li, SUN Yan-Fang, LIU Yun, WANG Li-Jun. HIGH POWER AND HIGN BEAM QUALITY 980nm BOTTOM-EMITTING VERTICAL-CAVITYSURFACE-EMITTING LASER[J]. J. Infrared Millim. Waves,2010,29(5):329~332.]

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历史
  • 收稿日期:2009-04-22
  • 最后修改日期:2009-04-22
  • 录用日期:2009-06-10
  • 在线发布日期: 2010-10-27
  • 出版日期: