中长双色红外焦平面探测器组件技术研究
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昆明物理研究所,云南 昆明650223

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TN36

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Study of MW/LW dual-band IRFPAs detector assemblies
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Kunming Institute of Physics,Kunming 650223,China

Fund Project:

Supported by the National Science and Technology Major Project of the Ministry of Science and Technology of China.

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    摘要:

    在(211)B碲锌镉衬底上,采用分子束外延生长制备了PPP型中长双色碲镉汞材料,通过台面孔刻蚀、侧壁钝化等工艺,实现中长双色640×512 红外焦平面探测器组件研制。中长双色碲镉汞材料测试结果表明,表面宏观缺陷(2~10 μm)密度统计分布约773 cm-2,同时对材料进行了XRD双晶衍射半峰宽(FWHM)测试和位错腐蚀坑(EPD)统计,XRD测试FWHM约31.9 arcsec,EPD统计值约为5×105 cm-2;双色器件芯片台面刻蚀深度达到8 μm以上,深宽比达到1∶1以上,侧壁覆盖率达到72.5%。中长双色红外焦平面组件测试结果表明,中波波长响应范围为3.6~5.0 μm,长波波长响应范围为7.4~9.7 μm,中波向长波的串音为0.9 %,长波向中波的串音为3.1 %,中波平均峰值探测率达到3.31×1011 cm·Hz1/2/W,NETD为17.7 mK;长波平均峰值探测率达到6.52×1010 cm·Hz1/2/W,NETD为32.8 mK;中波有效像元率达到99.46%,长波有效像元率达到98.19 %,初步实现中长双色红外焦平面组件研制。

    Abstract:

    Based on (211) B CdZnTe substrate, PPP type medium-wave and long-wave dual-band HgCdTe material was prepared by molecular beam epitaxy. The medium-wave and long-wave dual-band 640×512 infrared focal plane detector assembly was fabricated by mesa-hole etching, sidewall passivation and other processes. The test results of MW/LW dual-band HgCdTe material show that the macro defects (2~10 μm) density is about 773 cm-2. Then, the materials were tested by XRD double crystal diffraction half peak width (FWHM) and etch pit density (EPD). The FWHM measured by XRD is about 31.9 arcsec, and the EPD is about 5 ×105 cm-2. The etching depth of dual-band device chip mesa reaches 8 μm or more, the depth-width ratio is more than 1∶1, and the sidewall coverage is 72.5%. The test results of dual-band IRFPAs show that the response range is 3.6~5.0 μm and 7.4~9.7 μm. The crosstalk of medium wave to long wave is 0.9%, and long wave to medium wave is 3.1%. The average peak detection rate of medium wave and long wave reaches 3.31 × 1011 cm ? Hz1/2/w and 6.52 × 1010 cm ? Hz1/2/w, while the NETD and effective pixel rate are 17.7 mK, 32.8 mK and 99.46%, 98.19%, respectively.

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耿松,杨晋,李树杰,覃钢,李立华,赵俊,李艳辉,孔金丞,赵鹏,左大凡,胡彦博,梁艳,任洋.中长双色红外焦平面探测器组件技术研究[J].红外与毫米波学报,2023,42(3):292~299]. GENG Song, YANG Jin, LI Shu-Jie, QIN Gang, LI Li-Hua, ZHAO Jun, LI Yan-Hui, KONG Jin-Cheng, ZHAO Peng, ZUO Da-Fan, HU Yan-Bo, LIANG Yan, REN Yang. Study of MW/LW dual-band IRFPAs detector assemblies[J]. J. Infrared Millim. Waves,2023,42(3):292~299.]

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  • 收稿日期:2022-09-25
  • 最后修改日期:2023-04-04
  • 录用日期:2022-12-06
  • 在线发布日期: 2023-03-30
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