This paper presents a concise review of the silicon based optical waveguides, devices and technology.The low loss waveguides,electro optic waveguide devices,waveguide photodetectors for infrared radiation detection,and SiO 2 optical circuits are included.
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刘育染 王启明.硅基光波导结构与器件[J].红外与毫米波学报,1996,15(1):65~71]. Liu Yuliang Wang Qiming. SI BASED OPTICAL WAVEGUIDE STRUCTURES AND DEVICES[J]. J. Infrared Millim. Waves,1996,15(1):65~71.]