高功率单高阶模倒置表面浮雕结构垂直腔面发射激光器
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长春理工大学高功率半导体激光国家重点实验室,长春理工大学高功率半导体激光国家重点实验室,长春理工大学高功率半导体激光国家重点实验室,长春理工大学科技部国家纳米操 纵与制造国际联合研究中心,长春理工大学高功率半导体激光国家重点实验室,长春理工大学高功率半导体激光国家重点实验室,长春理工大学高功率半导体激光国家重点实验室,长春理工大学空间光电技术研究所

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国家自然科学基金项目(面上项目,重点项目,重大项目);国家总装预研基金;国家“111”工程基金


High power single-higher-mode VCSEL with inverted surface relief
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National Key Lab of High-Power Semiconductor Lasers, Changchun University of Science and Technology,National Key Lab of High-Power Semiconductor Lasers, Changchun University of Science and Technology,National Key Lab of High-Power Semiconductor Lasers, Changchun University of Science and Technology,International Research Centre for Nano Handling and Manufacturing, Changchun University of Science and Technology,National Key Lab of High-Power Semiconductor Lasers, Changchun University of Science and Technology,National Key Lab of High-Power Semiconductor Lasers, Changchun University of Science and Technology,National Key Lab of High-Power Semiconductor Lasers, Changchun University of Science and Technology,NUERC of Space and Optoelectronics Technology, Changchun University of Science and Technology

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    摘要:

    提出并研究了一种带有环形出光孔的倒置表面浮雕结构垂直腔面发射激光器.该器件最突出的结构特点在于,支持稳定的单高阶横向模式激射.在输入电流为六倍阈值电流时,输出功率高达9.8 mW,边模抑制比将近30 dB.在外界为360 K高温时,输出功率仍可达4 mW.且其远场表现出的高斯光束发散角较小.

    Abstract:

    An inverted surface relief vertical-cavity surface-emitting laser (ISR-VCSEL) with annular light emitting window has been presented and investigated. The most prominent structural feature of the device is that the stable single-higher-order transverse mode emission is supported. The laser emits output power up to 9.8 mW at about six times threshold current with an SMSR close to 30 dB, and it can still keep the output power of 4 mW even at as high ambient temperature as 360 K. The measured far field power intensity shows a Gaussian-shaped beam profile with low divergence.

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王霞,郝永芹,晏长岭,王作斌,王志伟,谢检来,马晓辉,姜会林.高功率单高阶模倒置表面浮雕结构垂直腔面发射激光器[J].红外与毫米波学报,2018,37(2):168~172]. WANG Xia, HAO Yong-Qin, YAN Chang-Ling, WANG Zuo-Bin, WANG Zhi-Wei, XIE Jian-Lai, MA Xiao-Hui, JIANG Hui-Lin. High power single-higher-mode VCSEL with inverted surface relief[J]. J. Infrared Millim. Waves,2018,37(2):168~172.]

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  • 收稿日期:2017-09-21
  • 最后修改日期:2018-01-12
  • 录用日期:2017-11-06
  • 在线发布日期: 2018-05-03
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