基于钽酸锂晶体材料镍铬薄膜在14~16 µm波段红外增强吸收特性
投稿时间:2016-11-07  修订日期:2017-04-11  点此下载全文
引用本文:刘子骥,梁志清,何璇,马振东,苟军,蒋亚东.基于钽酸锂晶体材料镍铬薄膜在14~16 µm波段红外增强吸收特性[J].红外与毫米波学报,2017,36(4):389~392].LIU Zi-Ji,LIANG Zhi-Qing,HE Xuan,MA Zhen-Dong,GOU Jun,JIANG Ya-Dong.Enhanced infrared absorption of NiCr film fabricated on LiTaO3 crystal material for 14~16 µm application[J].J.Infrared Millim.Waves,2017,36(4):389~392.]
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作者单位E-mail
刘子骥 电子科技大学 电子薄膜与集成器件国家重点实验室 zjliu@uestc.edu.cn 
梁志清 电子科技大学 liangzq2012@126.com 
何璇 电子科技大学  
马振东 电子科技大学  
苟军 电子科技大学  
蒋亚东 电子科技大学  
基金项目:国家自然科学基金项目(面上项目,重点项目,重大项目);中国博士后科学基金;创新研究群体科学基金;中央高校基本科研业务费项目
中文摘要:纳米级金属薄膜能够作为热释电探测器红外吸收薄膜在14-16um波段范围内有效应用已经得到证明。通过调节沉积在LT(钽酸锂)晶体材料上的纳米级镍铬(NiCr)薄膜的厚度和表面特征来改善纳米金属薄膜红外吸收特性。通过调节晶体材料的厚度,改变抗反射腔的深度,从而调节吸收波长。为进一步加强红外吸收,应用化学腐蚀,生成粗糙的纳米级薄膜表面结构,从而极大程度上增加吸收表面积。通过将这两种方法结合,可以明显增强指定波段的红外吸收,且其制造过程完全兼容,易于实现。可控的吸收性能的实验结果与仿真和设计情况相符合。
中文关键词:NiCr  热释电探测器  纳米金属薄膜  化学腐蚀  红外吸收
 
Enhanced infrared absorption of NiCr film fabricated on LiTaO3 crystal material for 14~16 µm application
Abstract:Nano–scale metallic films have been proven to be an effective infrared absorption layer for pyroelectric detector operated at 14-16um spectral range for space applications. Improved infrared absorption can be achieved by adjusting the thickness and surface characteristics of nano–scale Nickel–chromium (NiCr) film deposited on the LT (lithium tantalite) crystal materials. By regulating the thickness of the crystal materials, the absorption wavelength is adjustable as well by changing the depth of anti-reflection cavity. To enhance the infrared absorption further, chemical corrosion is applied on this film, which generates rough nano–scale surface structure and greatly increases the absorption surface area. By combining this two methods, specified infrared wavelength absorption could be distinctly enhanced, and the manufacturing process is fully compatible and easily to realize. Experiment results suggest that the absorption performance which could be controlled agree well with the simulation and design.
keywords:NiCr  pyroelectric detector  nano–scale thin metallic films  chemical corrosion  infrared absorption
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