使用椭偏光谱研究氮化铝薄膜在不同温度下的光学性质
投稿时间:2016-08-12  修订日期:2016-11-10  点此下载全文
引用本文:林书玉,吴峰,陈长清,梁毅,万玲玉,冯哲川.使用椭偏光谱研究氮化铝薄膜在不同温度下的光学性质[J].红外与毫米波学报,2017,36(3):276~280].LIN Shu-Yu,WU Feng,CHEN Chang-Qing,LIANG Yi,WAN Lin-Yu,FENG Zhe-Chuan.Temperature-dependent optical properties of AlN films characterized by spectroscopic ellipsometry[J].J.Infrared Millim.Waves,2017,36(3):276~280.]
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作者单位E-mail
林书玉 广西大学物理科学与工程技术学院 745659272@qq.com 
吴峰 华中科技大学 wu_wufeng@126.com 
陈长清 华中科技大学  
梁毅 广西大学物理科学与工程技术学院  
万玲玉 广西大学物理科学与工程技术学院  
冯哲川 广西大学物理科学与工程技术学院  
基金项目:国家自然科学基金项目(面上项目,重点项目,重大项目)
中文摘要:通过椭偏仪对生长在蓝宝石上的不同厚度氮化铝薄膜的变温光学性质进行了研究, 并采用托克-洛伦兹模型对椭偏实验数据进行了拟合分析, 精确得到了氮化铝薄膜的厚度和光学常数(折射率n, 消光系数k)等.研究的结果表明: 相比薄的氮化铝薄膜, 厚的氮化铝薄膜的折射率较大.随着温度的升高, 氮化铝的折射率、消光系数和带隙会向低能端单调地移动(红移);厚度对带隙随温度改变的影响较小, 对折射率则有一定的影响.
中文关键词:氮化铝  椭偏仪  厚度  温度
 
Temperature-dependent optical properties of AlN films characterized by spectroscopic ellipsometry
Abstract:We investigated the optical properties of AlN films with different thicknesses grown on sapphire by spectroscopic ellipsometry at different temperature. Based on a Tauc-Lorentz dispersion model, thickness and optical constants (the refractive index n, the extinction coefficient k) of AlN films were extracted by fitting the experimental data. Our results show that the refractive index of thicker AlN film possesses bigger values. Similar to the previous report, it was also found that the refractive index, the extinction coefficient and band gap of AlN films shift monotonously to lower energies (a redshift) with temperature increasing. Moreover, with rising temperature, varying the thicknesses of the films exhibits little influence on the shrinkage of bandgap but slight influence on the changes of the refractive index.
keywords:AlN, Spectroscopic Ellipsometry, thickness, temperature
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