(英)磁控溅射制备纳米晶GZO/CdS双层膜及GZO/CdS/p-Si异质结光伏器件的研究
投稿时间:2018-05-02  修订日期:2018-05-27  点此下载全文
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作者单位E-mail
何波 东华大学 应用物理系 laserhebo@163.com 
*徐静 上海大学 分析测试中心  
邢怀中 东华大学物理系 xinghz@dhu.edu.cn 
王春瑞 东华大学 应用物理系 crwang@dhu.edu.cn 
莫观孔 广西大学 资源环境与材料学院  
沈晓明 广西大学 资源环境与材料学院  
基金项目:军委装备部“十三五”武器装备预先研究领域基金“石墨烯材料在电池中的应用基础技术” (编号:6140721040412)
中文摘要:本文中,采用磁控溅射制备Ga掺杂ZnO (GZO)/CdS双层膜在p型晶硅衬底上以形成GZO/CdS/p-Si异质结器件。纳米晶GZO/CdS双层膜的微结构、光学及电学特性,通过XRD、SEM、XPS、紫外-可见光分光光度计和霍尔效应测试系统表征。GZO/CdS/p-Si异质结J-V曲线显示良好的整流特性。在±3V时,整流比IF/IR(IF和IR分别表示正向和反向电流)已达到21。结果表明纳米晶GZO/CdS/p-Si异质结具有好的二极管特性,在反向偏压下获得高光电流密度。纳米晶GZO/CdS/p-Si异质结显示明显的光伏特性。由于CdS晶格常数在GZO和晶Si之间,它能作为一个介于GZO和晶Si之间的缓冲层,能有效地减少GZO和p-Si之间的界面态。因此,我们获得了GZO/CdS/p-Si异质结明显光伏特性。
中文关键词:纳米晶GZO/CdS双层膜,磁控溅射,异质结,电流-电压(I-V)特性
 
Preparation of nanocrystalline GZO/CdS bilayer films using magnetron sputtering and GZO/CdS/p-Si heterojunction photovalotic device
Abstract:In this work, Ga doped ZnO (GZO)/CdS bilayer films were prepared on p-Si substrate by magnetron sputtering to form GZO/CdS/p-Si heterojunction device. The structural, optical and electrical properies of the nanocrystalline GZO/CdS bilayer films were studied by XRD, SEM, XPS, UV-VIS spectrophotometer and Hall effect measurement. The J-V curve of GZO/CdS/p-Si heterojunction device shows good rectifying behavior. And the value of IF/IR (IF and IR stand for forward and reverse current, respectively) at ±3V is found to be as high as 21. The results indicate that the nanocrystalline GZO/CdS/p-Si heterojunction possesses good diode characteristic. High photocurrent density is obtained under a reverse bias. The nanocrystalline GZO/CdS/p-Si heterojunction device exhibits clear photovoltaic effect. Because the lattice constant of CdS is between GZO and Si, it can be used for a buffer layer between GZO and Si, to effectively reduce the interface states between GZO and p-Si. Therefore, we observed the clear photovoltaic effect of GZO/CdS/p-Si heterojunction.
keywords:Nanocrystalline  GZO/CdS  bilayer films, Magnetron  sputtering, Heterojunction, Current-voltage (I-V) characteristics
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