128×128短波/中波双色红外焦平面探测器
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国家自然科学基金项目(面上项目,重点项目,重大项目)


128×128 SW/MW two-color HgCdTe IRFPAs
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    摘要:

    首次在国内报道了128×128面阵短波/中波(SW/MW)双色碲镉汞(HgCdTe)红外焦平面探测器(infrared focal plane arrays, IRFPAs)的研究成果.基于由采用分子束外延(MBE)和原位掺杂技术生长的ppPN型碲镉汞(Hg1-xCdxTe)多层异质结材料,通过B+注入、台面腐蚀、台面侧向钝化和爬坡金属化,以及双色探测芯片与读出电路(Readout Integrated Circuit,ROIC)混成互连等工艺,得到了128×128面阵双色焦平面探测器.通过湿化学腐蚀方法的优化,将光敏元尺寸为(50×50)μm2的双色微台面探测器的占空比提高了一倍.该面阵双色红外焦平面探测器具有较好的均匀性和正常的光电特性.在液氮温度下,二个波段的光电二极管截止波长λc分别为2.7μm和4.9μm,对应的峰值探测率D*λp分别为1.42×1011cmHz1/2/W和2.15×1011 cmHz1/2/W.

    Abstract:

    The results of 128×128 SW/MW twocolor HgCdTe infrared focal plane arrays (IRFPAs) were presented. By B+implantation, mesaisolation etching, sidewall passivation, sidewall metallization and flipchip hybridization with readout integrated circuit (ROIC),128×128 SW/MW twocolor HgCdTe IRFPAs detector was fabricated from a fourlayer ppPN heterojunction of Hg1-xCdxTe film grown by molecular beam epitaxy and insitu doping techniques. The micromesa fillfactor of (50×50)μm2 twocolor detector arrays was doubled by optimizing the wetchemical etching process. The staring SW/MW twocolor HgCdTe IRFPAs detector performed high uniformity and normal photoelectric properties. At liquid nitrogen temperature, the cutoff wavelengths of the twocolor IRFPAs were 2.7μm and 4.9μm, respectively, and the peak detectivities (D*λp) were 1.42×1011cmHz1/2/W and 2.15×1011cmHz1/2/W respectively. 

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叶振华,尹文婷,黄建,胡伟达,陈路,廖亲君,陈洪雷,林春,胡晓宁,丁瑞军,何力.128×128短波/中波双色红外焦平面探测器[J].红外与毫米波学报,2010,29(6):415~418]. YE Zhen-Hua, YIN Wen-Ting, HUANG Jian, HU Wei-Da, CHEN Lu, LIAO Qin-Jun, CHEN Hong-Lei, LIN Chun, HU Xiao-Ning, DING Rui-Jun, HE Li.128×128 SW/MW two-color HgCdTe IRFPAs[J]. J. Infrared Millim. Waves,2010,29(6):415~418.]

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  • 收稿日期:2009-08-25
  • 最后修改日期:2010-05-31
  • 录用日期:2009-09-03
  • 在线发布日期: 2010-11-22
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