Bi2VO5.5铁电薄膜的制备及电学性质研究
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国家自然科学基金项目(面上项目,重点项目,重大项目)


PREPARATION AND ELECTRICAL PROPERTIES OF Bi2VO5.5 FERROELECTRIC THIN FILM
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    摘要:

    利用溶胶凝胶法在 n-Si(100)衬底上成功制备了钒酸铋 (Bi2VO5.5)铁电薄膜.利用X射线衍射和原子力显微镜对薄膜的微结构进行了分析,结果表明 Bi2VO5.5薄膜与 n-Si衬底有着良好的晶格匹配并表现出高度的c轴择优取向,晶粒大小均匀.对薄膜电学性质的研究表明 Bi2VO5.5薄膜具有良好的 C-V特性,±4 V偏压下,存储窗大于0.4 V.当外加偏压3.2 V时,漏电流密度为5×10-8 Acm-2.1 kHz下介电常数和介电损耗分别为95和0.22.这些结果说明 Bi2VO5.5在铁电存储器方面具有较大的应用前景.

    Abstract:

    Ferroelectric bismuth vanadate(B2VO5.5) thin films were successfully fabricated on n-type Si (100) substrate by sol-gel method. The microstructures of the films were investigated by X-ray diffraction and atomic force microscopy. The results indicated that B2VO5.5 thin films show a good match with the n-Si substrate and a high c-axis preferred orientation with a uniform grain distribution. The investigation on the electrical properties of B2VO5.5 thin films indicated that B2VO5.5 thin films show good capacitance-voltage characteristics, and the memory window was larger than 0.4 V with the gate voltage ±4 V. The leakage current density was about 5×10-8 Acm-2 when the applied voltage was 3.2 V. The dielectric constant and dielectric loss measured at 1 kHz were 95 and 0.22 respectively. All the results indicate that Bi2VO5.5 thin films have potential applications in ferroelectric memory devices.

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张振伦,邓红梅,郭鸣,杨平雄,褚君浩. Bi2VO5.5铁电薄膜的制备及电学性质研究[J].红外与毫米波学报,2010,29(4):248~250]. ZHANG Zhen-Lun, DENG Hong-Mei, GUO Ming, YANG Ping-Xiong, CHU Jun-Hao. PREPARATION AND ELECTRICAL PROPERTIES OF Bi2VO5.5 FERROELECTRIC THIN FILM[J]. J. Infrared Millim. Waves,2010,29(4):248~250.]

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  • 收稿日期:2009-06-13
  • 最后修改日期:2010-02-04
  • 录用日期:2009-09-18
  • 在线发布日期: 2010-08-24
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