基于MXenes/微构造硅异质结光电探调控特性研究
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1.西南大学物理科学与技术学院;2.重庆师范大学初等教育学院;3.中国科学院上海技术物理研究所;4.国防科技大学电子对抗学院/脉冲激光功率技术国家重点实验室

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脉冲功率激光技术国家重点实验室开放课题(SKL2023KF40), 重庆市自然科学基金(CSTB2023NSCQ-MSX0807,CSTB2024NSCQ-MSX0994),中央高校专项业务费(SWU-KU24004),浦江人才计划(No. 23PJ1414800)


Study on Regulation Characteristics of Photodetectors Based on MXenes/Microstructured Silicon Heterojunctions
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1.School of Physical Science and Technology, Southwest Unvierstiy;2.School of primary education, Chongqing Normal University;3.Shanghai Institute of Technical Physics,Chinese Academy of Sciences;4.State Key Laboratory of Pulsed Power Laser Technology, Electronic Countermeasure Institute, National University of Defense Technology

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Open Project of the State Key Laboratory of Pulsed Power Laser Technology (SKL2023KF40),the Natural Science Foundation of Chongqing (Grant Nos. CSTB2024NSCQ-MSX0994 and CSTB2023NSCQ-MSX0807), Fundamental Research Funds for Central Universities (Grant No. SWU-KU24004),and Shanghai Pu Jiang Program (23PJ1414800).

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    摘要:

    表面微构造硅独特的光学特性在光电传感器、太阳能电池等领域展现出广阔应用前景。为进一步探索基于其表面结构的光电调控作用,本文报道了一种基于MXenes(Ti3C2Tx)的光电特性与微构造硅基底表面结构,通过旋涂等工艺手段,构筑硅基表面调控的新型异质结光电探测器。对比研究商用硅、微构造硅及Ti3C2Tx/微构造硅器件在不同波长/功率光辐照下的I-V特性及光电响应特性,发现Ti3C2Tx/微构造硅光电探测器在200-1750 nm波段的外量子效率和响应率均显著优于商用硅和微构造硅探测器。其中在近红外波段(1100-1750 nm),该器件也表现出更优越的性能指标,其外量子效率超1000%,响应率大于10 A/W。相比之下,同波段内商用硅探测器的外量子效率小于10%,响应率不超过0.3 A/W;微构造硅探测器的外量子效率小于15%,响应率不超过0.08 A/W。动态响应及偏压分析表明,Ti3C2Tx涂层凭借高导电率及与微构造硅形成的异质结内建电场,显著增强近红外至中红外波段探测能力,响应时间由38 ns缩短至20 ns。该异质结在光通信高速探测、激光雷达、光传感等领域展现出广阔应用前景。

    Abstract:

    Surface-microstructured silicon exhibits unique optical properties, demonstrating promising potential for applications in photoelectric sensors, solar cells, and related fields. To further explore the optoelectronic modulation effects based on its surface architecture, this study presents a novel heterojunction photodetector constructed by integrating MXene (Ti3C2Tx) with microstructured silicon substrate through spin-coating and other fabrication techniques.Comparative studies were conducted on commercial silicon, microstructured silicon, and Ti3C2Tx/microstructured silicon devices under varying wavelengths and optical power densities. The current-voltage (I-V) characteristics and photoresponse performance reveal that the Ti3C2Tx/microstructured silicon photodetector exhibits significantly superior external quantum efficiency (EQE) and responsivity across a broad spectral range of 200-1750 nm compared to commercial silicon and microstructured silicon detectors. Notably, in the near-infrared region (1100-1800 nm), the device demonstrates exceptional performance, achieving EQE exceeding 1000% and responsivity greater than 10 A/W. In contrast, commercial silicon photodetector in the same spectral range shows EQE below 10% and responsivity no higher than 0.3 A/W, while microstructured silicon photodetector exhibits EQE of below 15% and responsivity limited to 0.08 A/W. Further dynamic response and bias-dependent analyses indicate that the Ti3C2Tx coating, owing to its high conductivity and the built-in electric field formed at the heterojunction with microstructured silicon, significantly enhances detection capability from the NIR to MIR. Additionally, the response time is remarkably reduced from 38 ns to 20 ns. This heterojunction holds great promise for high-speed photodetection in optical communications, LIDAR, photoelectric sensing, and other advanced optoelectronic applications.

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  • 收稿日期:2025-04-16
  • 最后修改日期:2025-05-07
  • 录用日期:2025-05-12
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