基于T法的光谱仪动镜速度复合控制
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1.中国科学院上海技术物理研究所,上海 200083;2.红外科学与技术全国重点实验室,上海 200083;3.中国科学院大学,北京 100049

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TP731

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Moving mirror speed compound control of the Fourier transform spectrometer based on T-method
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1.Shanghai Institutes of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China;2.State Key Laboratory of Infrared Physics, Chinese Academy of Sciences, Shanghai 200083, China;3.University of Chinese Academy of Sciences, Beijing 100049, China

Fund Project:

Supported by the National Key Research and Development Program of China(2023YFB3905400)

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    摘要:

    傅里叶变换光谱仪是一种精密的红外探测仪器,它采用迈克尔逊式干涉分光方式,动镜是其中一个核心部件。动镜运动速度的均匀性和稳定性直接影响了后续干涉图的质量,所以必须对动镜进行高精度的运动控制。对于某些动镜低速应用场合的傅里叶光谱仪,常规的M法测速已经不能满足测速精度的要求了。另外,动镜低速运动时,速度稳定性更容易受外界力学扰动的影响。基于动镜低速运动的平稳性需求,文中对基于T法测速的动镜运动控制技术进行了研究,提出了求取速度实测值和速度期望值的高精度算法,并通过建立被控对象的数学模型和动力学方程,得到速度前馈控制量,进而设计了基于速度前馈的复合速度控制器。该设计的动镜速度控制算法由FPGA硬件平台实现,并应用于傅里叶光谱仪实验平台。实验结果表明,采用T法测速控制系统获得动镜运动匀速区速度峰峰值误差是0.0182,速度均方根值误差是0.0027。为测试文中动镜速度控制系统的抗干扰能力,在干涉仪安装平台动镜运动方向分别施加5 mg、7.5 mg、10 mg的正弦激励力,在每个给定量级的激励力下,进行了2~200 Hz频率范围内各频率点的扫描,实验结果表明,速度峰峰值误差和速度均方根值误差和正弦激励的幅值基本成正比例关系。在5 mg时各频率点的力学激励下,速度峰峰值误差最大是0.0724,速度均方根值误差最大是0.0225。从光谱稳定度和红外焦平面探测器采样间隔误差综合分析,5mg量级时的动镜速度均匀性可以满足系统这两方面需求,使得傅里叶光谱仪在微振动环境应用时也具有一定的抗干扰能力。该设计为傅里叶光谱仪低速高平稳性动镜速度控制的实现提供了一种技术途径,同时也使得傅里叶光谱仪有了更广阔的应用场景。

    Abstract:

    The Fourier transform spectrometer (FTS) is a precision infrared detection instrument. It adopts Michelson interference splitting, and the moving mirror is one of the core components. The uniformity and stability of the moving mirror’s speed directly affect the quality of the subsequent interferogram, so it is necessary to carry out high-precision motion control of the moving mirror. For some FTS with moving mirror in low-speed motion, the traditional M-method can no longer meet the requirements of speed measurement accuracy. In addition, when the moving mirror moves at a low speed, the speed stability is more easily affected by external mechanical disturbance. Based on the stability requirement of the low-speed moving mirror, this paper studies the motion control of the moving mirror based on the T-method measuring speed. It proposes a high-precision algorithm to obtain the measured and expected value of the velocity. By establishing the mathematical model and dynamic equation of the controlled object, the speed feedforward input is obtained, and then the compound speed controller based on the feedforward control is designed. The control algorithm is implemented by the FPGA hardware platform and applied to the FTS. The experimental results show that the peak-to-peak velocity error is 0.0182, and the root mean square (RMS) velocity error is 0.0027. To test the anti-interference capability of the moving mirror speed control system, the sinusoidal excitation force of 5 mg, 7.5 mg, and 10 mg is applied in the moving mirror motion direction on the FTS platform. Under each given magnitude, the scanning of each frequency point in 2~200 Hz is carried out. The experimental results show that the peak-to-peak velocity error and the RMS velocity error are proportional to the excitation magnitude. Under the 5 mg excitation, the maximum peak-to-peak velocity error is 0.0724, and the maximum RMS velocity error is 0.0225. From a comprehensive analysis of spectrum stability and the sampling interval error of the infrared focal plane detector, the moving mirror velocity uniformity at 5 mg can meet both requirements. This enables the FTS to possess certain anti-interference capability even when applied in micro-vibration environments. This design provides a technical means for realizing the speed control of the moving mirror with low speed and high stability. Also, it makes the FTS have wider applications.

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黄莹,段娟,郭倩,丁雷,华建文.基于T法的光谱仪动镜速度复合控制[J].红外与毫米波学报,2026,45(1):137~147]. HUANG Ying, DUAN Juan, GUO Qian, DING Lei, HUA Jian-Wen. Moving mirror speed compound control of the Fourier transform spectrometer based on T-method[J]. J. Infrared Millim. Waves,2026,45(1):137~147.]

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  • 收稿日期:2025-01-16
  • 最后修改日期:2025-12-22
  • 录用日期:2025-03-07
  • 在线发布日期: 2025-12-15
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