基于相变材料的宽带高消光比非易失性光开关
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1.中国科学院上海微系统与信息技术研究所集成电路材料全国重点实验室,上海200050;2.中国科学院大学,北京 100049;3.上海大学微电子学院,上海 201800

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O439

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Broadband high-extinction-ratio nonvolatile optical switch based on phase change material
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Affiliation:

1.State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;2.University of the Chinese Academy of Sciences, Beijing 100049, China;3.School of Microelectronics, Shanghai University, Shanghai 201800, China

Fund Project:

Supported by the National Natural Science Foundation of China (62204250) and the Autonomous deployment project of State Key Laboratory of Materials for Integrated Circuits (SKLJC-Z2024-A05).

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    摘要:

    本文介绍了一种基于相变材料 Sb2Se3 的宽带、高消光比、非易失的 2×2 马赫-增德尔干涉仪(MZI)型光开关。在波长为 1 550 nm 时,插入损耗 (IL) 为 0.84 dB,消光比 (ER) 达到 28.8 dB。器件的3 dB 带宽大于 150 nm。在 3 dB 带宽内,直通态和交叉态的消光比分别大于 20.3 dB 和 16.3 dB。Sb2Se3的晶化和非晶化功耗分别为 105.86 nJ 和 49 nJ。该宽带高消光比非易失性光开关在光互连和光计算中有极大的应用潜力。

    Abstract:

    In this paper, we present a broadband, high-extinction-ratio, nonvolatile 2×2 Mach-Zehnder interferometer (MZI) optical switch based on the phase change material Sb2Se3. The insertion loss (IL) is 0.84 dB and the extinction ratio (ER) reaches 28.8 dB at the wavelength of 1 550 nm. The 3 dB bandwidth is greater than 150 nm. Within the 3 dB bandwidth, the ER is greater than 20.3 dB and 16.3 dB at bar and cross states, respectively. The power consumption for crystallization and amorphization of Sb2Se3 is 105.86 nJ and 49 nJ, respectively. The switch holds significant promise for optical interconnects and optical computing applications.

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梁凯,岳文成,许凡,朱倩男,张建民,王书晓,蔡艳.基于相变材料的宽带高消光比非易失性光开关[J].红外与毫米波学报,2026,45(1):36~41]. LIANG Kai, YUE Wen-Cheng, XU Fan, ZHU Qian-Nan, ZHANG Jian-Min, WANG Shu-Xiao, CAI Yan. Broadband high-extinction-ratio nonvolatile optical switch based on phase change material[J]. J. Infrared Millim. Waves,2026,45(1):36~41.]

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  • 收稿日期:2025-01-02
  • 最后修改日期:2025-12-04
  • 录用日期:2025-02-18
  • 在线发布日期: 2025-11-28
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