腔体型超表面非制冷红外探测器
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昆明物理研究所,云南 昆明 650223

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O623;TN214

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Cavity-type metasurface uncooled infrared detector
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Kunming Institute of Physics, Kunming 650223, China

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    摘要:

    随着非制冷红外探测器像元尺寸的逐步缩小,提高探测器吸收率变得越来越重要。该文章基于现有的制备工艺,提出了一种IMIAM(Insulator-Metal-Insulator-Air-Metal)腔体型超表面非制冷红外探测器结构,在增强探测器吸收的同时有效改善了光敏层受热的均匀性。通过系统的仿真优化,其在长波红外波段(8~14 μm)的平均吸收率超过了97%,使器件几乎实现了百分百的完美吸收,同时在中红外波段也表现出了优异的吸收特性。该文章还通过工艺验证了该结构的可靠性,对于改进现有非制冷红外探测器工艺具有一定的启示意义。

    Abstract:

    As the cell size of uncooled infrared (IR) detectors progressively shrinks, it becomes increasingly important to increase detector absorption. here, an IMIAM (Insulator-Metal-Insulator-Air-Metal) cavity type metasurface uncooled IR detector structure is proposed, which effectively improves the uniformity of the photosensitive layer while enhancing the absorption of the detector. Utilizing systematic simulation and optimization, it has achieved almost perfect absorption in the Long Wavelength Infrared range (8~14 μm), meanwhile, it also shows excellent absorption performance in Mid Wavelength Infrared band. In this paper, the reliability of the structure is also verified by the process. this research may provide alternatives for optimizing conventional uncooled IR detectors

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杨君,杨春丽,方辉,袁俊,鄢善入,李华英,黎秉哲.腔体型超表面非制冷红外探测器[J].红外与毫米波学报,2024,43(5):621~627]. YANG Jun, YANG Chun-Li, FANG Hui, YUAN Jun, YAN Shan-Ru, LI Hua-Ying, LI Bing-Zhe. Cavity-type metasurface uncooled infrared detector[J]. J. Infrared Millim. Waves,2024,43(5):621~627.]

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  • 收稿日期:2024-01-29
  • 最后修改日期:2024-08-04
  • 录用日期:2024-03-12
  • 在线发布日期: 2024-08-02
  • 出版日期: 2024-10-25
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