单片集成式中波碲镉汞偏振焦平面阵列
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昆明物理研究所 红外探测器中心,云南 昆明 650223

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O43

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A monolithic integrated medium wave Mercury Cadmium Telluride polarimetric focal plane array
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Infrared Detector Center, Kunming Institute of Physics, Kunming 650223, China

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Supported by the self-funded project of Kunming Institute of Physics

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    摘要:

    本文提出了一种中波640×512(25 μm)的碲镉汞偏振焦平面阵列。从线栅结构优化和串扰抑制的层面,对微偏振片阵列进行了精心设计;探索了一种低损伤的片上制备工艺,经验证,该工艺与碲镉汞器件兼容良好。在完成微偏振片阵列的片上集成后,NETD仍能保持在9.5 mK以下。进一步地,为揭示主导消光比的潜在作用机制,设计了特殊的微偏振片阵列排布方式,从实验上证明了串扰效应是影响消光比的主要来源。将像元边缘的遮挡区域扩展至4 μm宽,能够将来自相邻像元的串扰率有效降低至大约2%,并实现在17.32~27.41之间的优良消光比。

    Abstract:

    A medium wave (MW) 640×512 (25 μm) Mercury Cadmium Telluride (HgCdTe) polarimetric focal plane array (FPA) was demonstrated. The micro-polarizer array (MPA) has been carefully designed in terms of line grating structure optimization and crosstalk suppression. A monolithic fabrication process with low damage was explored, which was verified to be compatible well with HgCdTe devices. After monolithic integration of MPA, NETD < 9.5 mK was still maintained. Furthermore, to figure out the underlying mechanism that dominated the extinction ratio (ER), specialized MPA layouts were designed, and the crosstalk was experimentally validated as the major source that impacted ER. By expanding opaque regions at pixel edges to 4 μm, crosstalk rates from adjacent pixels could be effectively reduced to approximately 2%, and promising ERs ranging from 17.32 to 27.41 were implemented.

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陈泽基,黄佑文,浦恩祥,肖徽山,徐世春,秦强,孔金丞.单片集成式中波碲镉汞偏振焦平面阵列[J].红外与毫米波学报,2024,43(4):479~489]. CHEN Ze-Ji, HUANG You-Wen, PU En-Xiang, XIAO Hui-Shan, XU Shi-Chun, QIN Qiang, KONG Jin-Cheng. A monolithic integrated medium wave Mercury Cadmium Telluride polarimetric focal plane array[J]. J. Infrared Millim. Waves,2024,43(4):479~489.]

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  • 收稿日期:2023-11-05
  • 最后修改日期:2024-06-17
  • 录用日期:2023-12-06
  • 在线发布日期: 2024-06-14
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