基于InAs/GaAsSb 超晶格的中红外波导探测器结构设计
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1.国科大杭州高等研究院 物理与光电工程学院,浙江 杭州 310024;2.中国科学院上海技术物理研究所 红外成像材料与器件重点实验室,上海 200083

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TN304.2;TN305

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Structural design of mid-infrared waveguide detectors based on InAs/GaAsSb superlattice
Author:
Affiliation:

1.School of Physics and Optoelectronic Engineering, Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, Hangzhou 310024, China;2.Key Laboratory of Infrared Imaging Materials and Detectors, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China

Fund Project:

Supported by the National Natural Science Foundation of China(NSFC) (61904183, 61974152, 62104237, 62004205); the Youth Innovation Promotion Association of the Chinese Academy of Sciences(Y202057); Shanghai Science and Technology Committee Rising-Star Program(20QA1410500); Shanghai Sail Plans(21YF1455000).

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    摘要:

    在近红外领域,已经利用片上波导和谐振器实现了分子的光谱检测。然而在中红外波段,许多传感器仍使用芯片外光源和探测器,这限制了化学传感芯片的集成度和灵敏度。本文设计了一种 InAs/GaAsSb 超晶格中红外波导集成探测器,采用 GaAsSb 作为中红外波导,波导层和 InAs/GaAsSb 超晶格吸收层之间采用倏逝波耦合方式,可以实现低损耗和高响应度的中红外光探测。对器件的光电特性进行了模拟,着重分析了 InAs/GaAsSb 超晶格光电探测器与 GaAsSb 波导集成的影响因素,得到了吸收区的最优厚度和长度。当吸收区的厚度为0.3 μm、长度为50 μm时,噪声等效功率最低,量子效率可以达到68.9%。基于Ⅲ-Ⅴ族材料的波导探测器更容易集成中红外光源,实现中红外的片上集成光电检测芯片。

    Abstract:

    In the realm of near-infrared spectroscopy, the detection of molecules has been achieved using on-chip waveguides and resonators. In the mid-infrared band, the integration and sensitivity of chemical sensing chips are often constrained by the reliance on off-chip light sources and detectors. In this study, we demonstrate an InAs/GaAsSb superlattice mid-infrared waveguide integrated detector. The GaAsSb waveguide layer and the InAs/GaAsSb superlattice absorbing layer are connected through evanescent coupling, facilitating efficient and high-quality detection of mid-infrared light with minimal loss. We conducted a simulation to analyze the photoelectric characteristics of the device. Additionally, we investigated the factors that affect the integration of the InAs/GaAsSb superlattice photodetector and the GaAsSb waveguide. Optimal thicknesses and lengths for the absorption layer are determined. When the absorption layer has a thickness of 0.3 μm and a length of 50 μm, the noise equivalent power reaches its minimum value, and the quantum efficiency can achieve a value of 68.9%. The utilization of waveguide detectors constructed with III-V materials offers a more convenient means of integrating mid-infrared light sources and achieving photoelectric detection chips.

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裴金狄,柴旭良,王昱彭,周易.基于InAs/GaAsSb 超晶格的中红外波导探测器结构设计[J].红外与毫米波学报,2024,43(4):457~463]. PEI Jin-Di, CHAI Xu-Liang, WANG Yu-Peng, ZHOU Yi. Structural design of mid-infrared waveguide detectors based on InAs/GaAsSb superlattice[J]. J. Infrared Millim. Waves,2024,43(4):457~463.]

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  • 收稿日期:2023-10-20
  • 最后修改日期:2024-06-15
  • 录用日期:2023-12-01
  • 在线发布日期: 2024-06-13
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