1.中国科学院大学 集成电路学院,北京 100049;2.中国科学院大学 材料与光电研究中心,北京 100049;3.中国科学院半导体研究所 半导体集成技术工程研究中心,北京 100083;4.中国科学技术大学 微电子学院,安徽 合肥 230026;5.湖北九峰山实验室 研究中心,湖北 武汉 430074
TN386
国家自然科学基金(61971395)
1.School of Integrated Circuits, University of Chinese Academy of Sciences, Beijing 100049, China;2.Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China;3.Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;4.School of Microelectronics, University of Science and Technology of China, Hefei 230026, China;5.Research Center, HuBei Jiufengshan Laboratory, Wuhan 430074, China
Supported by the National Natural Science Foundation of China (61971395)
康亚茹,董慧,刘晶,黄镇,李兆峰,颜伟,王晓东.侧栅晶体管太赫兹探测器的物理模型、结构制备与直流测试[J].红外与毫米波学报,2024,43(4):526~532]. KANG Ya-Ru, DONG Hui, LIU Jing, HUANG Zhen, LI Zhao-Feng, YAN Wei, WANG Xiao-Dong. The physical model, structural fabrication, and DC testing of lateral gate transistor terahertz detectors[J]. J. Infrared Millim. Waves,2024,43(4):526~532.]
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