12.5 µm 1 024×1 024长波InAs/GaSb II类超晶格红外焦平面探测器
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中国科学院上海技术物理研究所红外探测全国重点实验室,上海 200083

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中图分类号:

TN304.2;TN305

基金项目:

国家自然基金资助项目(62004205,62104236,62104237,62222412)、国家重点研发计划项目(2022YFB3606800)、上海市启明星培育项目扬帆专项(21YF1455000、22YF1455800)、中国科学院上海技术物理研究所创新专项基金资助项目(CX-455)。


12.5 μm 1 024×1 024 long-wavelength infrared InAs/GaSb Type II superlattice focal plane arrays
Author:
Affiliation:

National Key Laboratory of Infrared Detection Technologies, Shanghai Institute of Technical Physics, Chinese Academy of Sciences,Shanghai 200083,China

Fund Project:

Project supported by National Natural Science Foundation of China (NSFC) Fund (62004205,62104236,62104237,62222412), National Key Research and Development Program of China (2022YFB3606800), Shanghai Rising-Star Program(21YF1455000,22YF1455800) and Special Fund for Innovation of SITP, CAS (CX-455).

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    摘要:

    报道了12.5 μm的InAs/GaSb II类超晶格长波红外焦平面探测器。实验采用分子束外延技术在GaSb衬底上生长超晶格材料。吸收区超晶格结构为15ML(InAs)/7ML(GaSb)。探测器采用PBπBN的双势垒结构以抑制长波探测器暗电流。研制了规模为1 024×1 024,像元中心距为18 μm的长波焦平面探测器。采用金属杜瓦封装,与制冷机耦合形成超晶格长波探测器制冷组件。在60 K温度下测试了探测器各项性能。探测器50%截止波长为12.5 μm,平均峰值探测率达到6.6×1010 cmHz1/2/W,盲元率为1.05%,噪声等效温差NETD为21.2 mK。红外焦平面成像测试得到了清晰的长波成像。

    Abstract:

    In this paper, the research results of 12.5 μm long-wavelength infrared InAs/GaSb superlattice focal plane arrays were reported. The superlattice structure was grown on GaSb substrate using molecular beam epitaxy (MBE) technology. The respective structure of absorption region is 15ML ( InAs) /7ML ( GaSb). The detector adopts PBπBN double barrier structure to suppress the dark current. A long-wave focal plane detector with the size of 1 024×1 024 and the pixel center-to-center distance of 18 μm was developed. The detector is packaged by a metal dewar, and a superlattice long-wavelength detector cryocooler assembly is formed by coupling with a refrigerator. At 60 K measurement, the detector has 50% cut-off wavelength of 12.5 μm. The detector has a peak detectivity of 6.6×1010 cm?Hz1/2/W , dead pixels rate of 1.05% and a noise equivalent temperature difference (NETD) is 21.2 mK. The Infrared images of the test have been taken clearly using the infrared imaging detector.

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白治中,黄敏,徐志成,周易,朱艺红,沈益铭,张君玲,陈洪雷,丁瑞军,陈建新.12.5 µm 1 024×1 024长波InAs/GaSb II类超晶格红外焦平面探测器[J].红外与毫米波学报,2024,43(6):738~743]. BAI Zhi-Zhong, HUANG Ming, XU Zhi-Cheng, ZHOU Yi, ZHU Yi Hong, SHEN Yi-Ming, ZHANG Jun-Lin, CHEN Hong-Lei, DING Rui-Jun, CHEN Jian-Xin.12.5 μm 1 024×1 024 long-wavelength infrared InAs/GaSb Type II superlattice focal plane arrays[J]. J. Infrared Millim. Waves,2024,43(6):738~743.]

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  • 收稿日期:2023-09-19
  • 最后修改日期:2024-11-07
  • 录用日期:2023-09-27
  • 在线发布日期: 2024-10-28
  • 出版日期: 2024-12-25
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