电流增益截止频率为441 GHz的InGaAs/InAlAs InP HEMT
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作者单位:

1.中国科学院微电子研究所,高频高压器件与集成电路研究中心,北京100029;2.中国科学院大学集成电路学院,北京100049

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TN385

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InGaAs/InAlAs InP-based HEMT with the current cutoff frequency of 441 GHz
Author:
Affiliation:

1.High-Frequency High-Voltage Device and Integrated Circuits Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China;2.School of Integrated Circuits, University of Chinese Academy of Sciences, Beijing 100049, China

Fund Project:

Supported by The National Natural Science Foundation of China (61434006)

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    摘要:

    本文设计并制作了fT > 400 GHz的In0.53Ga0.47As/In0.52Al0.48As 铟磷高电子迁移率晶体管(InP HEMT)。采用窄栅槽技术优化了寄生电阻。器件栅长为54.4 nm,栅宽为2 × 50 μm。最大漏极电流IDS.max为957 mA/mm,最大跨导gm.max为1 265 mS/mm。即使在相对较小的VDS = 0.7 V下,电流增益截止频率fT达到了441 GHz,最大振荡频率fmax达到了299 GHz。该器件可应用于太赫兹单片集成放大器和其他电路中。

    Abstract:

    In this letter, an In0.53Ga0.47As/In0.52Al0.48As InP-based HEMT with fT > 400 GHz was designed and fabricated successfully. A narrow gate recess technology was used to optimize the parasitic resistances. The gate length is 54.4 nm, and the gate width is 2 × 50 μm. The maximum drain current IDS.max is 957 mA/mm, and the maximum transconductance gm.max is 1 265 mS/mm. The current gain cutoff frequency fT is as high as 441 GHz and the maximum oscillation frequency fmax reaches 299 GHz, even at a relatively small value of VDS = 0.7 V. The reported device can be applied to terahertz monolithic integrated amplifiers and other circuits.

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封瑞泽,曹书睿,冯识谕,周福贵,刘同,苏永波,金智.电流增益截止频率为441 GHz的InGaAs/InAlAs InP HEMT[J].红外与毫米波学报,2024,43(3):331~335]. FENG Rui-Ze, CAO Shu-Rui, FENG Zhi-Yu, ZHOU Fu-Gui, LIU Tong, SU Yong-Bo, JIN Zhi. InGaAs/InAlAs InP-based HEMT with the current cutoff frequency of 441 GHz[J]. J. Infrared Millim. Waves,2024,43(3):331~335.]

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  • 收稿日期:2023-04-13
  • 最后修改日期:2024-04-24
  • 录用日期:2023-06-01
  • 在线发布日期: 2024-04-23
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