Ti掺杂对Sb2Te3薄膜的结构及光学性质的调控
作者:
作者单位:

1.复旦大学 光科学与工程系上海超精密光学制造工程技术研究中心,上海 200438;2.南京邮电大学 电子与光学工程学院&微电子学院,江苏 南京 210023;3.复旦大学 微纳光子结构教育部重点实验室,上海 200433

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O43

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Regulation on microstructural and optical properties of Sb2Te3 films induced by titanium doping
Author:
Affiliation:

1.Department of Optical Science and Engineering, Shanghai Ultra-Precision Optical Manufacturing Engineering Center, Fudan University, Shanghai 200438, China;2.College of Electronic and Optical Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, China;3.Key Laboratory of Micro and Nano Photonic Structures (Ministry of Education), Fudan University, Shanghai 200433, China

Fund Project:

Supported by National Natural Science Foundation of China (60578047, 61427815), Natural Science Foundation of Shanghai (17ZR1402200, 13ZR1402600)

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    摘要:

    对Sb2Te3薄膜的结构、线性光学及非线性吸收性质的Ti掺杂影响进行了系统性探究。利用磁控溅射和高温退火手段制备了不同Ti掺杂浓度的晶态Sb2Te3薄膜。X射线光电子能谱分析显示Sb2Te3薄膜中的Ti元素以Ti4+化学态以TiTe2的形式存在。线性光学性质结果表明,在保持非线性器件中宽工作波长特性的同时,Ti掺杂可以提高Sb2Te3薄膜的透射率,并降低光学带隙从1.32 eV至1.25 eV,根据Burstein-Moss理论,这取决于载流子的减少。利用自主搭建的开孔Z扫描系统,测试了薄膜样品在132 GW/cm2强度下800 nm飞秒激光激发的非线性吸收性质,结果显示的Ti掺杂引起的饱和吸收可调谐行为可归因于光学带隙减小与晶化抑制的竞争效应。此外,Ti掺杂将Sb2Te3薄膜的激光损伤阈值从188.6 GW/cm2提高到了265.5 GW/cm2。总而言之,Ti掺杂Sb2Te3薄膜在非线性光学器件领域具有广泛的应用前景。

    Abstract:

    In this work, the doping effects of Ti on the structural, linear optical properties and nonlinear absorption of Sb2Te3 thin films were systematically studied. A magnetron sputtering system and an annealing furnace are employed to prepare the crystalline Sb2Te3 samples with different doping concentrations of Ti. The X-ray photoelectron spectroscopy analysis confirmed that the Ti element exists in the Sb2Te3 films is in the form of TiTe2, in which the chemical state of Ti4+ arises. For linear optical properties, the results indicate that the Ti dopant can improve the transmittance of the Sb2Te3 films, when a wide working wavelength is used in the nonlinear devices. The optical band gap decreases from 1.32 eV to 1.25 eV for the Ti-doped Sb2Te3 films, which is dependent on the reduction of carriers according to the Burstein-Moss theory. An open-aperture Z-scan system is set up to determine the nonlinear saturated absorption of the film samples, which is excited by an 800 nm femtosecond laser at a power of 132 GW/cm2. Moreover, the adjustable behavior caused by Ti doping could be attributed to the competition between the decrease in the optical band gap and the inhibition of the crystallization. Additionally, it is interesting to ?nd that the Ti doping improves the laser damage threshold of the Sb2Te3 thin films from 188.6 to 265.5 GW/cm2. In general, the Ti-doped Sb2Te3 thin films have wide-ranging application possibilities for the field of nonlinear optical devices.

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廖袁杰,李耀鹏,宋晓晓,张欣彤,张书博,张腾飞,吕孟奇,刘镇,邹意蕴,张野,胡二涛,李晶. Ti掺杂对Sb2Te3薄膜的结构及光学性质的调控[J].红外与毫米波学报,2022,41(6):1022~1029]. LIAO Yuan-Jie, LI Yao-Peng, SONG Xiao-Xiao, ZHANG Xin-Tong, ZHANG Shu-Bo, ZHANG Teng-Fei, LUY Meng-Qi, LIU Zhen, ZOU Yi-Yun, ZHANG Ye, HU Er-Tao, LI Jing. Regulation on microstructural and optical properties of Sb2Te3 films induced by titanium doping[J]. J. Infrared Millim. Waves,2022,41(6):1022~1029.]

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  • 收稿日期:2022-06-16
  • 最后修改日期:2022-11-28
  • 录用日期:2022-08-10
  • 在线发布日期: 2022-11-15
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