10 W近衍射极限输出的高效率窄线宽主控振荡放大半导体激光器
作者:
作者单位:

1.中国工程物理研究院 高能激光重点实验室,四川 绵阳 621900;2.中国工程物理研究院应用电子学研究所,四川 绵阳 621900

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中图分类号:

TN3

基金项目:

国家自然科学基金(11804322);中国工程物理研究院创新发展基金 (C-2020-CX2019035)


Monolithic master oscillator high efficiency diode laser with nearly diffraction-limited narrowband emission and 10 W of optical output power
Author:
Affiliation:

1.Key Laboratory of Science and Technology on High Energy Lasers, CAEP, Mianyang 621900, China;2.Institute of Applied Electronics, CAEP, Mianyang 621900, China

Fund Project:

the National Natural Science Foundation of China (11804322) , the Innovation and Development Fund of CAEP (C-2020-CX2019035)

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    摘要:

    为研制近衍射极限的高功率半导体激光器,采用了片上光栅、窄脊型波导、锥形放大器一体集成的主控放大(Master Oscillator Power-Amplifier, MOPA)技术路线,以长度为8 mm、脊型宽度为3 μm的波导为单模种子源,配合长度为7 mm、全角为3.3°的锥形放大器,实现了功率10.3 W、慢轴光束质量M2(1/e2)因子=1.06,3 dB线宽40 pm,工作电光效率50.5%的半导体激光输出,并采用片上电致加热光栅调谐技术,实现了中心波长在4 nm范围内连续可调。

    Abstract:

    High-power semiconductor laser with nearly diffraction limited narrowband emission was designed and fabricated. The monolithic master oscillator power-amplifier (MOPA) diode laser consists of distributed Bragg gratings, a narrow ridge waveguide and a tapered amplifier. The ridge waveguide with length of 8 mm and width of 3 μm is used as the single-mode seed source. A tapered gain section with length of 7 mm and a full taper angle of 3.3° amplify the seed power. The fabricated device reach an output power of 10.3 W with a slow axis beam quality M2 (1/e2) factor of 1.06 and an electro-optic efficiency of 50.5% . The spectral linewidth is 40 pm (3 dB), and a central wavelength tuning range of 4 nm was realized by the integrated Bragg gratings micro heater.

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杜维川,何林安,李弋,贺钰雯,谢鹏飞,周坤,张亮,刘晟哲,高松信,唐淳.10 W近衍射极限输出的高效率窄线宽主控振荡放大半导体激光器[J].红外与毫米波学报,2023,42(1):21~25]. DU Wei-Chuan, HE Lin-An, LI Yi, HE Yu-Wen, XIE Peng-Fei, ZHOU Kun, ZHANG Liang, LIU Sheng-Zhe, GAO Song-Xin, TANG Chun. Monolithic master oscillator high efficiency diode laser with nearly diffraction-limited narrowband emission and 10 W of optical output power[J]. J. Infrared Millim. Waves,2023,42(1):21~25.]

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  • 收稿日期:2022-01-14
  • 最后修改日期:2023-01-06
  • 录用日期:2022-02-17
  • 在线发布日期: 2023-01-06
  • 出版日期: 2023-02-25
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