1.中国科学院上海技术物理研究所 红外成像材料与器件重点实验室,上海 200083;2.中国科学院大学,北京 100049
TN304.2;TN305
国家重点研发计划(2016YFB0402403),国家自然科学基金(61974152, 61904183, 61534006),中国科学院青年创新促进会会员(2016219),上海市青年科技启明星项目(20QA141500)。
1.Key Laboratory of Infrared Imaging Materials and Detectors, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China;2.University of Chinese Academy of Sciences, Beijing 100049, China
Supported by National Key Research and Development Program of China (2016YFB0402403), National Natural Science Foundation of China (61974152, 61904183, 61534006), the Youth Innovation Promotion Association(2016219), Shanghai Rising-Star Program (20QA141500).
崔玉容,徐志成,黄敏,许佳佳,陈建新,何力. InAs/GaSb II类超晶格红外探测器光敏元蚀刻表面特性[J].红外与毫米波学报,2021,40(4):427~431]. CUI Yu-Rong, XU Zhi-Cheng, HUANG Min, XU Jia-Jia, CHEN Jian-Xin, HE Li. Fabrication and characteristics of InAs/GaSb Type-II superlattice infrared detector pixel mesas[J]. J. Infrared Millim. Waves,2021,40(4):427~431.]
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