InAs/GaSb II类超晶格红外探测器光敏元蚀刻表面特性
作者:
作者单位:

1.中国科学院上海技术物理研究所 红外成像材料与器件重点实验室,上海 200083;2.中国科学院大学,北京 100049

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中图分类号:

TN304.2;TN305

基金项目:

国家重点研发计划(2016YFB0402403),国家自然科学基金(61974152, 61904183, 61534006),中国科学院青年创新促进会会员(2016219),上海市青年科技启明星项目(20QA141500)。


Fabrication and characteristics of InAs/GaSb Type-II superlattice infrared detector pixel mesas
Author:
Affiliation:

1.Key Laboratory of Infrared Imaging Materials and Detectors, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China;2.University of Chinese Academy of Sciences, Beijing 100049, China

Fund Project:

Supported by National Key Research and Development Program of China (2016YFB0402403), National Natural Science Foundation of China (61974152, 61904183, 61534006), the Youth Innovation Promotion Association(2016219), Shanghai Rising-Star Program (20QA141500).

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    摘要:

    采用刻蚀技术形成台面结构的红外探测器光敏元,其表面漏电流和器件热稳定性与半导体蚀刻表面的特性密切相关。对制备的InAs/GaSb II类超晶格中波红外探测器台面蚀刻区域特性进行了研究报道。通过台面结栅控结构和快速热退火相结合的实验研究,发现热退火处理使得样品在温度80 K,偏置电压-0.05 V下的暗电流密度从2.17×10-7 A/cm2上升至6.96×10-5 A/cm2,并且有无退火样品的暗电流随偏置电压变化表现出明显的不同。退火导致光敏元台面侧壁电荷密度上升2.76×1012 cm-2,引起了表面漏电流的增加,利用X射线光电子能谱(XPS)发现退火后台面蚀刻区域Sb单质含量增加。

    Abstract:

    The surface leakage current and thermal stability of the infrared detector are highly related to the sidewall surface of the mesa. This work focused on researching the sidewalls'' properties of InAs/GaSb type-II superlattice middle-wavelength infrared detectors by gate-control techniques. It was found the I-V curves for samples with or without annealing showed significant difference at 80 K, and the dark current density of the annealing sample increased from 2.17×10-?7 ?A/cm2 to 6.96×10-5A/cm2 comparing with the sample without annealing at the bias of -?0.05 V. The results of gate-control experiment proved the surface fixed charge was increased by 2.76×1012 cm-?2 after annealing, which caused severe surface tunneling leakage. And the XPS showed the elemental Sb increased after annealing.

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崔玉容,徐志成,黄敏,许佳佳,陈建新,何力. InAs/GaSb II类超晶格红外探测器光敏元蚀刻表面特性[J].红外与毫米波学报,2021,40(4):427~431]. CUI Yu-Rong, XU Zhi-Cheng, HUANG Min, XU Jia-Jia, CHEN Jian-Xin, HE Li. Fabrication and characteristics of InAs/GaSb Type-II superlattice infrared detector pixel mesas[J]. J. Infrared Millim. Waves,2021,40(4):427~431.]

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  • 收稿日期:2020-08-04
  • 最后修改日期:2020-08-14
  • 录用日期:2020-08-25
  • 在线发布日期: 2021-07-28
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