MEMS红外探测器响应时间测量方法研究
作者:
作者单位:

1.中北大学 仪器科学与动态测试教育部重点实验室,动态测试技术山西省重点实验室,山西 太原 030051;2.中科院学院微电子研究所 智能感知研发中心,北京 100029;3.江苏创芯海微科技有限公司,江苏 无锡 214001;4.山西大学 量子光学与光量子器件国家重点实验室,山西 太原 030006

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中图分类号:

TN216

基金项目:

国家自然科学基金 61771467 51425505 51935011;中国科学院青年创新促进会 2018153;山西省“1331工程”重点学科建设基金,广东省重点领域研发计划项目 2019B010117001国家自然科学基金(No. 61771467, 51425505 ,51935011),中国科学院青年创新促进会(2018153),山西省“1331工程”重点学科建设基金,广东省重点领域研发计划项目(项目号:2019B010117001)


A response time measurement method For MEMS IR Detectors
Author:
Affiliation:

1.North University of China, Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, Shanxi Provincial Key Laboratory of Dynamic Testing Technology, Taiyuan 030051, China;2.Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China;3.Advanced Sensing Department, Wuxi Internet of Things Innovation Center Co. Ltd., Wuxi 214001, China;4.State key laboratory of Quantum Optics and Quantum Optics Devices, Shanxi University, Taiyuan 030006, China

Fund Project:

National Natural Science Foundation of China 61771467 51425505 51935011;Youth Innovation Promotion Association, Chinese Academy of Sciences 2018153;Fund for Shanxi “1331 Project” Key Subject Construction, High Technology Research and Development Project of Guangdong 2019B010117001Supported by National Natural Science Foundation of China (Grant No. 61771467, 51425505 and 51935011), Youth Innovation Promotion Association, Chinese Academy of Sciences (Grant No. 2018153), and Fund for Shanxi “1331 Project” Key Subject Construction, High Technology Research and Development Project of Guangdong (Grant No. 2019B010117001)

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    摘要:

    传统地,MEMS红外探测器响应时间的测量需要基于黑体辐射源、斩波器、水冷装置等设备搭建一套复杂的测量系统,然而斩波器的遮挡区域和透光区域具有一定的面积,其按某频率工作时会消耗一定的时间,而测试所得的器件响应时间无法排除斩波器的工作耗时,导致测试结果存在较大误差,所测响应时间为14.46ms。为解决这一问题,提出了一种以钛宝石激光器为辐射光源,利用声光调制器构建纳秒级激光脉冲,MEMS红外探测器响应激光脉冲的作用输出脉冲电信号,很好地规避了测量系统中设备工作耗时引入的时间参数,所测响应时间仅为3.13ms。由此可见,传统方法中斩波器工作耗时引入的时间误差甚至超过器件响应时间的300%,充分证明了此方法可以有效解决这一问题,进而为MEMS红外探测器以及其它光学探测器性能参数的测试与计量提供了一种新的方法。

    Abstract:

    As is known, response time of a MEMS infrared (IR) detector is usually measured using a complicated measurement system consisting of a blackbody radiation source, a chopper and a water-cooling apparatus. For such a system, both blocking and hollow patterns in the chopper have certain areas, which consume a certain part of time when the chopper spins at a certain frequency. In conventional measurements of response time, however, it is difficult to exclude the time consumed by a chopper, as a result, a large error is usually introduced into the system. To address such an issue, a response time measurement system for MEMS IR detectors using a fast-pulse laser as its radiation source is proposed in this work. Such a system is able to avoid extra time parameter being introduced by equipment . For a thermopile IR detector, response time measured based on traditional method is 14.46ms, while based on the newly established system, the response time is only 3.13ms. This indicates that the new method can perfectly avoid a 300% time error introduced by the traditional method.

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引用本文

张琛琛,毛海央,白乐乐,熊继军,王玮冰,陈大鹏. MEMS红外探测器响应时间测量方法研究[J].红外与毫米波学报,2020,39(5):621~627]. ZHANG Chen-Chen, MAO Hai-Yang, BAI Le-Le, XIONG Ji-Jun, WANG Wei-Bing, CHEN Da-Peng. A response time measurement method For MEMS IR Detectors[J]. J. Infrared Millim. Waves,2020,39(5):621~627.]

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  • 收稿日期:2019-12-10
  • 最后修改日期:2020-08-18
  • 录用日期:2020-04-08
  • 在线发布日期: 2020-08-13
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