微悬臂梁非致冷红外探测器的研制
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TN215

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中科院支撑项目(42201030104)


DESIGN AND FABRICATION OF MICRO-CANTILEVER UNCOOLED INFRARED DETECTOR
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    摘要:

    介绍了一种基于标准硅工艺的微悬臂梁非致冷红外探测器的设计和制作。由于氮化硅和铝的热膨胀系数相差很大,用这两种材料的薄膜做成的双材料微悬臂梁在红外辐射下温度升高并发生弯曲,微悬臂梁和衬底形成一个可变电容,通过检测电容的变化来反映微悬臂梁的弯曲,从而可以探测红外辐射的情况,利用外部测试设备对单元探测器进行测试表明,该微悬臂梁对红外辐射有很高的响应。

    Abstract:

    A micro-cantilever uncooled infrared(IR) detector was designed and fabricated based on standard silicon process.Because silicon nitride(S_iN_x) and aluminum(Al) have different thermal expansion coefficients,bi-material micro-cantilever that is composed of the films of S_iN_x and Al will bend when it absorbs IR radiation and its temperature changes.The variable micro-capacitor between the micro-cantilever and the substrate will change as the micro-cantilever bends.Hence,the information of IR radiation can be known when the change of the variable micro-capacitor is detected.The test of a single detector by outer apparatus shows that the micro-cantilever has strong response to IR radiation.

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刘海涛 陈永平 梁平治.微悬臂梁非致冷红外探测器的研制[J].红外与毫米波学报,2006,25(1):46~49]. LIU Hai-Tao, CHEN Yong-Ping, LIANG Ping-Zhi. DESIGN AND FABRICATION OF MICRO-CANTILEVER UNCOOLED INFRARED DETECTOR[J]. J. Infrared Millim. Waves,2006,25(1):46~49.]

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  • 收稿日期:2005-05-23
  • 最后修改日期:2005-11-27
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