碲镉汞p^+-on-n长波异质结探测器的研究
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TN215 TN304

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中国科学院知识创新工程资助项目(KGCX2-SWJG-06)


STUDY OF HgCdTe p+-on-n LONG-WAVELENGTH HETERO-JUNCTION DETECTOR
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    摘要:

    报道了HgCdTe p^ -on-o长波异质结焦平面器件的研究结果.采用由分子柬外延(MBE)和原位掺杂技术生长的P^ -on-n异质结材料,通过湿法腐蚀、台面钝化、台面金属化、铟柱制备和互连等工艺,得到了HgCdTe p^ -on-o长波异质结焦平面器件.根据,I-V实验结果和暗电流理论,拟合计算和分析了各种暗电流机制对器件性能的影响.且获得了器件的响应光谱和探测率。

    Abstract:

    The results of the HgCdTe p + on n long wavelength hetero junction infrared focal plane arrays were presented. HgCdTe p + on n hetero junction material was grown by molecular beam epitaxy(MBE) and in situ doping, and HgCdTe p + on n hetero junction infrared focal plane arrays were fabricated by the process of wet etching, side wall passivation, side wall matelization, indium bump fabrication and hybridization etc. According to the I V experiments and the dark current mechanism, the effect of all kinds of dark current was calculated and analyzed. The spectral response and detectivity of the device were also measured.

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叶振华 吴俊 胡晓宁 巫艳 王建新 李言谨 何力.碲镉汞p^+-on-n长波异质结探测器的研究[J].红外与毫米波学报,2004,23(6):423~426]. YE Zhen Hua, WU Jun, HU Xiao Ning, WU Yan, WANG Jian Xin, LI Yan Jin, HE Li. STUDY OF HgCdTe p+-on-n LONG-WAVELENGTH HETERO-JUNCTION DETECTOR[J]. J. Infrared Millim. Waves,2004,23(6):423~426.]

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  • 最后修改日期:2003-06-16
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