基于绝缘体上硅材料的25通道200 GHz的阵列波导光栅
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中国科学院半导体研究所 集成光电子学国家重点实验室,中国科学院半导体研究所 集成光电子学国家重点实验室,中国科学院半导体研究所;中国科学院大学材料科学与光电技术学院,中国科学院半导体研究所;中国科学院大学材料科学与光电技术学院,中国科学院半导体研究所;中国科学院大学材料科学与光电技术学院,中国科学院半导体研究所

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国家重点研发计划 (2016YFB0402504)、国家自然科学基金项目(面上项目,重点项目,重大项目) (61435013)


25-channel 200 GHz AWG based on SOI ridge waveguides
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Affiliation:

State Key Laboratory of Integrated Optoelectronics,Institute of Semiconductors, Chinese Academy of Sciences,Institute of Semiconductors, Chinese Academy of Science,Institute of Semiconductors, Chinese Academy of Science; College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences,Institute of Semiconductors, Chinese Academy of Science; College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences,Institute of Semiconductors, Chinese Academy of Science; College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences,Institute of Semiconductors, Chinese Academy of Science

Fund Project:

National Key R&D Program of China (2016YFB0402504), and National Nature Science Foundation of China (61435013)

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    摘要:

    报道了基于绝缘体上硅材料的25通道、信道间隔200 GHz的阵列波导光栅, 分别优化了输入波导/输出波导/阵列波导间的最小间距 (Δxi/Δxo/d) , 及其自由传播区和阵列波导之间边界结构 (W2/L2/L3) .实验结果表明, 该阵列波导光栅的插入损耗为5~7 dB, 串扰为13~15 dB, 该阵列波导光栅的性能得到有效提升.同时也提出了减小插损与串扰的进一步优化方案.

    Abstract:

    A SOI-based 25-channel AWG with 200 GHz channel spacing is demonstrated.The minimum distance between the input waveguides (Δxi) /output waveguides (Δxo) /arrayed waveguides (d) is optimized respectively.Then the boundary structures between the free propagation regions (FPRs) and the arrayed waveguides (W2/L2/L3) are optimized in detail.The experiment results showthat the insertion loss of the AWG is 5 ~ 7 d B, and the crosstalk of it is 13 ~ 15 dB.Compared with our previous work, the performance of AWG in this paper has been improved greatly, and further methods to improve the performances of insertion loss and crosstalk have been proposed as well.

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袁配,王玥,吴远大,刘丽杰,安俊明,胡雄伟.基于绝缘体上硅材料的25通道200 GHz的阵列波导光栅[J].红外与毫米波学报,2018,37(6):673~678]. YUAN Pei, WANG Yue, WU Yuan-Da, LIU Li-Jie, AN Jun-Ming, HU Xiong-Wei.25-channel 200 GHz AWG based on SOI ridge waveguides[J]. J. Infrared Millim. Waves,2018,37(6):673~678.]

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  • 收稿日期:2018-03-26
  • 最后修改日期:2018-09-26
  • 录用日期:2018-04-25
  • 在线发布日期: 2018-11-30
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