基于MOCVD再生长n+ GaN 欧姆接触工艺fT/fmax>150/210 GHz的AlGaN/GaN HFETs器件研究
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河北半导体研究所,河北半导体研究所,河北半导体研究所,河北半导体研究所,河北半导体研究所,河北半导体研究所,河北半导体研究所,河北半导体研究所,河北半导体研究所

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国家自然基金青年基金


fT/fmax>150/210 GHz AlGaN/GaN HFETs with regrown n+-GaN Ohmic contacts by MOCVD
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Hebei Semiconductor Research Institute,Hebei Semiconductor Research Institute,Hebei Semiconductor Research Institute,Hebei Semiconductor Research Institute,Hebei Semiconductor Research Institute,Hebei Semiconductor Research Institute,Hebei Semiconductor Research Institute,Hebei Semiconductor Research Institute,Hebei Semiconductor Research Institute

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    摘要:

    基于SiC衬底AlGaN/GaN异质结材料研制具有高电流增益截止频率(fT)和最大振荡频率(fmax)的AlGaN/GaN异质结场效应晶体管(HFETs).基于MOCVD外延n+ GaN 欧姆接触工艺实现了器件尺寸的缩小, 有效源漏间距(Lsd)缩小至600 nm.此外, 采用自对准工艺制备了60 nm T型栅.由于器件尺寸的缩小, 在Vgs=2 V下, 器件最大饱和电流(Ids)达到2.0 A/mm, 该值为AlGaN/GaN HFETs器件直流测试下的最高值, 器件峰值跨导达到608 mS/mm.小信号测试表明, 器件fT和fmax最高值分别达到152 GHz和219 GHz.

    Abstract:

    Scaled AlGaN/GaN heterostructure field-effect transistors (HFETs) with a high unity current gain cut-off frequency (fT) and maximum oscillation frequency (fmax) were fabricated and characterised on an SiC substrate. In the device, the source-to-drain distance (Lsd) was scaled to 600 nm using regrown n+-GaN Ohmic contacts. In addition, a 60-nm T-shaped gate was fabricated by self-aligned-gate technology. A recorded drain saturation current density (Ids) of 2.0 A/mm at Vgs=2 V and a peak extrinsic transconductance (gm) of 608 mS/mm were obtained in the scaled AlGaN/GaN HFETs. Moreover, in the devices with a 60-nm T-shaped gate, the maximum values of fT and fmax reached 152 and 219 GHz, respectively.

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吕元杰,冯志红,宋旭波,张志荣,谭鑫,郭红雨,房玉龙,周幸叶,蔡树军.基于MOCVD再生长n+ GaN 欧姆接触工艺fT/fmax>150/210 GHz的AlGaN/GaN HFETs器件研究[J].红外与毫米波学报,2016,35(5):534~538]. LV Yuan-Jie, FENG Zhi-Hong, SONG Xu-Bo, ZHANG Zhi-Rong, TAN Xin, GUO Hong-Yu, FANG Yu-Long, ZHOU Xing-Ye, CAI Shu-Jun. fT/fmax>150/210 GHz AlGaN/GaN HFETs with regrown n+-GaN Ohmic contacts by MOCVD[J]. J. Infrared Millim. Waves,2016,35(5):534~538.]

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  • 收稿日期:2016-01-02
  • 最后修改日期:2016-02-13
  • 录用日期:2016-02-23
  • 在线发布日期: 2016-10-05
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