利用表面等离子体波提高铂硅红外探测器量子效率
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北京理工大学光电学院,中国电子科技集团公司第44研究所 固体图像传感器事业部,北京理工大学光电学院,中国电子科技集团公司第44研究所 固体图像传感器事业部,中国电子科技集团公司第44研究所 固体图像传感器事业部,中国电子科技集团公司第44研究所 固体图像传感器事业部,北京理工大学光电学院

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Quantum efficiency enhancement for PtSi infrared detector by surface plasma waves
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Department of Optoelectronics, Beijing Institute of Technology,Department of Solid Image Sensor, The 44th Research Institute of China Electronic Equipment,Department of Optoelectronics, Beijing Institute of Technology,Department of Solid Image Sensor, The 44th Research Institute of China Electronic Equipment,Department of Solid Image Sensor, The 44th Research Institute of China Electronic Equipment,Department of Solid Image Sensor, The 44th Research Institute of China Electronic Equipment,Department of Optoelectronics, Beijing Institute of Technology

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    摘要:

    为提高铂硅肖特基势垒红外探测器的量子效率, 文章将平坦的铂硅-p型硅金半接触界面设计成光栅结构, 利用光栅耦合激发表面等离子波效应提高铂硅红外探测器光耦合效率.采用严格耦合波分析方法优化了光栅结构参数以及模拟了探测器在等离子共振波长处的电场分布.最后探讨了光耦合效率与铂硅红外探测器量子效率的定量关系, 发现在3~5 μm波段光栅结构的量子效率较平坦结构能提高2倍多, 在波长3 μm和3.4 μm时分别提高294和2.5倍.

    Abstract:

    To enhance quantum efficiency of infrared detectors made of PtSi Schottky barrier, the flat interface of PtSi/p-silicon metal semiconductor was modified to a grating structure. The incident radiation can be coupled with the surface plasma waves within this structure, thus to improve the optical coupling efficiency of the PtSi infrared detector. Based on rigorous coupled-wave analysis method, parameters of the grating structure were optimized and electric field distributions at resonant wavelength were simulated. The quantitative relationship between the optical coupling efficiency and quantum efficiency of PtSi Schottky barrier infrared detector was discussed. Comparing with the flat structure, the average quantum efficiency is evenly increased twice in 3~5 μm wavelength range, and approximately 2.94 and 2.5 times at 3 μm and 3.4 μm, respectively.

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康冰心,李华高,王岭雪,熊平,陈红兵,李立,蔡毅.利用表面等离子体波提高铂硅红外探测器量子效率[J].红外与毫米波学报,2016,35(5):550~556]. KANG Bing-Xin, LI Hua-Gao, WANG Ling-Xue, XIONG Ping, CHEN Hong-Bing, LI Li, CAI Yi. Quantum efficiency enhancement for PtSi infrared detector by surface plasma waves[J]. J. Infrared Millim. Waves,2016,35(5):550~556.]

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  • 收稿日期:2015-09-30
  • 最后修改日期:2015-12-21
  • 录用日期:2015-12-23
  • 在线发布日期: 2016-10-05
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