二氧化钒纳米周期点阵的光学特性
作者:
作者单位:

上海理工大学光电信息与计算机工程学院,上海理工大学光电信息与计算机工程学院,上海理工大学光电信息与计算机工程学院,上海理工大学光电信息与计算机工程学院,上海理工大学光电信息与计算机工程学院,上海理工大学光电信息与计算机工程学院,上海理工大学光电信息与计算机工程学院,上海理工大学光电信息与计算机工程学院,上海理工大学光电信息与计算机工程学院,上海理工大学光电信息与计算机工程学院,上海电力学院计算机与信息工程学院,上海理工大学光电信息与计算机工程学院

作者简介:

通讯作者:

中图分类号:

基金项目:

国家“863”计划(2006AA03Z348);教育部科学技术研究重点项目(207033);上海市科学技术委员会科技攻关计划(06DZ11415);上海市教育委员会科技创新重点项目(10ZZ94);上海市领军人才计划资助项目。


Optical properties of VO2 nano periodic array
Author:
Affiliation:

School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology,School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology,School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology,School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology,School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology,School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology,School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology,School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology,School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology,School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology,Department of Computer and Information Engineering, Shanghai University of Electric Power,School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology

Fund Project:

  • 摘要
  • |
  • 图/表
  • |
  • 访问统计
  • |
  • 参考文献
  • |
  • 相似文献
  • |
  • 引证文献
  • |
  • 资源附件
  • |
  • 文章评论
    摘要:

    为了得到相变温度低且性能优越的智能窗光学材料,基于时域有限差分法模拟计算了不同结构的VO2纳米周期点阵相变前后的光学特性,优选出最佳的VO2纳米周期点阵结构.采用直流磁控溅射和后退火工艺在玻璃衬底上制备VO2薄膜,再利用掩膜光刻的方法制备VO2纳米周期点阵结构,测试其组分结构,反射和透过率曲线.结果表明,填充比为0.74的圆形纳米周期点阵的相变温度有效降低了约25 ℃,在波长为1700 nm处的透过率改变量达到39 %,透过率整体高于VO2薄膜,呈现出良好的相变光学特性,说明通过调控VO2纳米周期点阵的结构可以有效提升材料的光学特性.

    Abstract:

    The optical properties of VO2 nano periodic array were studied in order to obtain low phase transition temperature and high quality optical material widely used in the field of intelligent window. Optical properties of VO2 nano periodic array at different filling ratios were calculated with finite difference time domain method, and the best VO2 nano periodic array was selected. Vanadium film was deposited on the glass substrate by magnetic DC sputtering, then VO2 film was formed by annealing under air condition, and VO2 nano periodic array was gained by photolithography and etching technology. Its microstructure and optical properties were tested by SEM, XRD and XPS as well as spectrophotometer. The results show that the phase transition temperature of VO2 nano periodic array with filling ratio 0.74 decrease about 25 ℃ and the transmittance has changed 39% between the metallic and semiconducting states at 1700 nm.VO2 nano periodic array exhibits the better optical properties than VO2 film before and after phase transition. It is indicated that the optical properties can be improved through regulating the structure of VO2 nano periodic array.

    参考文献
    相似文献
    引证文献
引用本文

唐佳茵,李毅,孙瑶,刘飞,郝如龙,伍征义,蒋蔚,徐婷婷,陈培祖,方宝英,王晓华,肖寒.二氧化钒纳米周期点阵的光学特性[J].红外与毫米波学报,2016,35(2):227~233]. TANG Jia-Yin, LI Yi, SUN Yao, LIU Fei, HAO Ru-Long, WU Zheng-Yi, JIANG Wei, XU Ting-Ting, CHEN Pei-Zu, FANG Bao-Ying, WANG Xiao-Hua, XIAO Han. Optical properties of VO2 nano periodic array[J]. J. Infrared Millim. Waves,2016,35(2):227~233.]

复制
分享
文章指标
  • 点击次数:
  • 下载次数:
  • HTML阅读次数:
  • 引用次数:
历史
  • 收稿日期:2015-04-30
  • 最后修改日期:2015-12-18
  • 录用日期:2015-06-18
  • 在线发布日期: 2016-05-11
  • 出版日期:
文章二维码