椭圆偏振研究溅射气压对锰膜光学性质的影响
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贵州大学大数据与信息工程学院新型光电子材料与技术研究所,贵州大学大数据与信息工程学院新型光电子材料与技术研究所,贵州大学大数据与信息工程学院新型光电子材料与技术研究所,贵州大学大数据与信息工程学院新型光电子材料与技术研究所,贵州大学大数据与信息工程学院新型光电子材料与技术研究所,贵州大学大数据与信息工程学院新型光电子材料与技术研究所

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国家自然科学基金项目(61264004);贵州省自然科学基金(合同号:黔科合J字[2013]2119号);贵州省优秀科技教育人才省长专项基金(合同号:黔省专合字[2011]40号);贵州省科技攻关项目(黔科合GY字[2011]3015);贵州省科技创新人才团队建设专项资金项目(黔科合人才团队[2011]4002);贵州省教育厅“125”重大科技专项项目(黔教合重大专项字[2012]003)


Influence of sputtering pressures on the optical properties of manganese film based on spectroscopic ellipsometry
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Institute of Advanced Optoelectronic Materials and Technology, College of Electronic Information, Guizhou University,Institute of Advanced Optoelectronic Materials and Technology, College of Electronic Information, Guizhou University,Institute of Advanced Optoelectronic Materials and Technology, College of Electronic Information, Guizhou University,Institute of Advanced Optoelectronic Materials and Technology, College of Electronic Information, Guizhou University,Institute of Advanced Optoelectronic Materials and Technology, College of Electronic Information, Guizhou University,Institute of Advanced Optoelectronic Materials and Technology, College of Electronic Information, Guizhou University

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    摘要:

    采用射频磁控溅射技术在Si(111)基片上制备金属锰膜, 用椭圆偏振光谱在2.0~4.0eV光子能量范围内研究了溅射压强对锰膜光学性质的影响.分别用德鲁得-洛伦兹模型以及有效介质模型对椭偏参数进行拟合, 结果表明随压强增大薄膜致密度先增大后减少; 折射率随压强增大先减少后增大; 而消光系数随压强的变化与光子能量有关, 在低能量区变化复杂, 高能量区随压强增加与折射率规律一致.分析表明上述变化与薄膜的致密度密切相关.

    Abstract:

    Spectroscopic ellipsometry was used to investigate the optical properties of Mn film deposited with different sputtering pressures on silicon substrates in the photo energy range of 2.0~4.0eV. Parameterized analyses, based on Drude-Lorenz model and Bruggeman effective-medium approximation model, were used to fitting the elliptic parameters. The results imply that the density of Mn films first increases and then decreases with increasing of Ar pressure, whereas the refractive index changes with Ar pressure in a contrary way. Meanwhile, the extinction coefficient has a complex relationship with Ar pressure at lower photo energy, the extinction coefficient changes in line with the refractive index when photo energy exceeds 2.8eV. Moreover, the effects of Ar pressure on optical constant of the film depend strongly on the variation of the Mn atomic density.

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唐华杰,张晋敏,金浩,邵飞,胡维前,谢泉.椭圆偏振研究溅射气压对锰膜光学性质的影响[J].红外与毫米波学报,2015,34(3):347~351]. TANG Hua-Jie, ZHANG Jin-Min, JIN Hao, SHAO Fei, HU Wei-Qian, XIE Quan. Influence of sputtering pressures on the optical properties of manganese film based on spectroscopic ellipsometry[J]. J. Infrared Millim. Waves,2015,34(3):347~351.]

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  • 收稿日期:2013-11-05
  • 最后修改日期:2014-01-08
  • 录用日期:2014-01-13
  • 在线发布日期: 2015-09-28
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