锰钴镍氧薄膜热敏型多元红外探测器研制
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中国科学院上海技术物理研究所 红外物理国家重点实验室,中国科学院上海技术物理研究所 红外物理国家重点实验室,中国科学院上海技术物理研究所 红外物理国家重点实验室,中国科学院上海技术物理研究所 红外物理国家重点实验室,中国科学院上海技术物理研究所 红外物理国家重点实验室

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国家自然科学基金(61275111,11204336);上海市自然科学基金(11ZR1442400, 12ZR1452200)


Development of bolometer detector array made of Mn-Co-Ni-Othin films
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National Laboratory for Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,National Laboratory for Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,National Laboratory for Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,National Laboratory for Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,National Laboratory for Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences

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    摘要:

    通过光刻和湿化学腐蚀工艺,成功制作出规格为2×8的多元锰钴镍氧薄膜红外探测器件.测试表明,室温下锰钴镍氧薄膜材料负电阻温度系数达-3.8%K-1.10Hz调制频率和±15V电压偏置条件下,线列器件典型探测元黑体响应率为107V/W,探测率为2×107cmHz1/2/W,8元器件响应不均匀度为5.9%.实验结果表明锰钴镍氧薄膜焦平面器件制备的可行性,有可能作为新型室温全波段探测器件得到应用.

    Abstract:

    The 2×8 element MnCoNiOdetector array was successfully fabricated with photolithography and wet-chemical etching process. It was shown that the negative temperature coefficient of resistance of the film reaches -3.8% K-1 at room temperature. The typical element of the fabricated detector array exhibits responsivity of about 107V/W and detectivity of about 2×107cmHz1/2/W respectively at bias voltage of ±15V and chopping frequency of 10Hz. The response uniformity of the linear array bolometers is about 5.9%. Our results proved the feasibility of MnCoNiOfilms for linear array bolometer applications, which can possibility be used as new-type uncooled bolometer detectors.

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张雷博,侯云,周炜,黄志明,褚君浩.锰钴镍氧薄膜热敏型多元红外探测器研制[J].红外与毫米波学报,2014,33(4):359~363]. ZHANG Lei-Bo, HOU Yun, ZHOU Wei, HUANG Zhi-Ming, CHU Jun-Hao. Development of bolometer detector array made of Mn-Co-Ni-Othin films[J]. J. Infrared Millim. Waves,2014,33(4):359~363.]

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  • 收稿日期:2013-03-13
  • 最后修改日期:2014-05-22
  • 录用日期:2013-04-02
  • 在线发布日期: 2014-09-02
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