MBE原位碲化镉钝化的碲镉汞长波光电二极管列阵
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国家自然科学基金项目(面上项目,重点项目,重大项目),中国科学院重大资助项目,中国科学院重点资助项目


HgCdTe photodiode arrays passivated with CdTe Flim
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    摘要:

    采用分子束外延(MBE)技术在表面生长碲化镉(CdTe)介质膜的p型碲镉汞(HgCdTe)材料,并通过离子注入区的光刻、暴露HgCdTe表面的窗口腐蚀、注入阻挡层硫化锌(ZnS)的生长、形成p-n结的B 注入、注入阻挡层的去除、绝缘介质膜ZnS的生长、金属化和铟柱列阵的制备等工艺,得到了原位CdTe钝化的n -on-p平面型HgCdTe红外光电二极管列阵.从温度为78 K的电流与电压(I-v)和动态阻抗与电压(R-v)特性曲线中,发现原位CdTe钝化的光电二极管列阵的零偏动态阻抗比非原位CdTe钝化的提高了1~2倍,零偏压附近的反向偏压位置的动态阻抗极大值甚至提高了30~40倍.对于工作在反向小偏压附近的光电二极管列阵,原位CdTe钝化方法非常有利于提高长波光电二极管的探测性能.

    Abstract:

    The results of HgCdTe long-wavelength infrared n -on-p planar photodiode arrays passivated by molecular beam epitaxy (MBE) in-situ grown CdTe film were presented in this paper. By mercury-vacancy p-type annealing, ion-implantation window exposure, ZnS ion-implantation barrier layer deposition, B -implantation, ion-implantation barrier layer removal, ZnS dielectric film deposition, metallization and indium-bump arrays fabrication, HgCdTe long-wavelength infrared n -on-p planar photodiode arrays using in-situ CdTe passivation was achieved from a Hg1-xCdxTe film covered with a layer of MBE in-situ grown CdTe film. Zero bias dynamic resistances of HgCdTe photodiode arrays using in-situ CdTe passivation were improved 1~2 times higher than those of non-in-situ CdTe passivation processed one, and the maximum dynamic resistances near small reverse biases were even increased by a factor of 30~40. Since their current-voltage curves were all measured at 78K, it is obvious that in-situ CdTe passivation was beneficial to suppress dark current of n -on-p planar photodiode by optimizing the interface between the HgCdTe detector and CdTe passivation layer, and then to enhance the performance of long-wavelength infrared photodiode arrays operating at small reverse biases.

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叶振华,黄建,尹文婷,胡伟达,冯婧文,陈路,廖亲君,陈洪雷,林春,胡晓宁,丁瑞军,何力. MBE原位碲化镉钝化的碲镉汞长波光电二极管列阵[J].红外与毫米波学报,2011,30(6):495~498]. YE Zhen-Hua, HUANG Jian, YIN Wen-Ting, HU Wei-Da, FENG Jing-Wen, CHEN Lu, LIAO Qin-Jun, CHEN Hong-Lei, LIN Chun, HU Xiao-Ning, DING Rui-Jun, HE Li. HgCdTe photodiode arrays passivated with CdTe Flim[J]. J. Infrared Millim. Waves,2011,30(6):495~498.]

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  • 收稿日期:2010-08-27
  • 最后修改日期:2011-04-11
  • 录用日期:2010-10-11
  • 在线发布日期: 2011-11-03
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