Picosecond Laser Dicing Process in the Packaging of Infrared Focal Plane Array Modules (II)
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Abstract:
Based on a brief introduction to the basic principles and equipment involved in picosecond laser dicing, the characteristics of some materials often involved in the packaging of infrared focal plane array modules and their action mechanisms to the picosecond laser beams are reviewed. By optimizing the laser parameter settings, the dicing efficiency is improved and the dicing quality is guaranteed; by improving the clamping apparatus, metal layer damage is avoided and the operation convenience is improved.
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Zhang Yi-nan, Mo De-feng, HONG Si-min, et al. Picosecond Laser Dicing Process in the Packaging of Infrared Focal Plane Array Modules (II)[J]. Infrared,2019,40(11):13~16