In掺杂CdSe中红外透明导电薄膜温度特性研究
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Study on Temperature Characteristics of In-Doped CdSe Mid-Infrared Transparent Conductive Film
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    摘要:

    在红外透明导电薄膜研究领域,缓解高透光率与低电阻率之间的矛盾是一个重大的科学挑战。采用分子束外延(Molecular Beam Epitaxy, MBE)技术研究了生长温度对铟掺杂硒化镉(CdSe:In)薄膜电学性能的影响,制备出兼具204 cm2·V-1·s-1高迁移率以及6.95×10-5 Ω·m低电阻率的透明导电薄膜。该薄膜在1~4 μm波段表现出大于87%的高透光率。温变特性研究结果表明,薄膜电导率存在三个温度区间,它们是根据载流子传输机制的转变而区分的。与已报道的其他中红外透明导电薄膜对比后可知,CdSe:In薄膜在载流子迁移率及透光率方面展现了明显的优势。本研究为CdSe:In薄膜在中红外探测器中的应用奠定了实验与理论基础。

    Abstract:

    In the research field of infrared transparent conductive films, alleviating the contradiction between high transmittance and low resistivity is a major scientific challenge. The molecular beam epitaxy (MBE) technique is used to study the effect of growth temperature on the electrical properties of indium-doped cadmium selenide (CdSe:In) films, and a transparent conductive film with a high mobility of 204 cm2·V-1·s-1 and a low resistivity of 6.95×10-5 Ω·m is prepared. The film exhibits a high transmittance of more than 87% in the 1-4 μm waveband. The results of the temperature-dependent characteristics study show that there are three temperature ranges for the conductivity of the film, which are distinguished by the transition of the carrier transportation mechanism. Compared with other reported mid-infrared transparent conductive films, it can be seen that the CdSe:In film shows obvious advantages in carrier mobility and transmittance. This study lays an experimental and theoretical foundation for the application of CdSe:In films in mid-infrared detectors.

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苏雷生,薛奔驰,邱继军. In掺杂CdSe中红外透明导电薄膜温度特性研究[J].红外,2025,46(6):15-23.

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