| 超长线列红外探测器组件低温面形研究 |
| 投稿时间：2022-12-07 修订日期：2022-12-23 点此下载全文 |
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| 中文摘要:随着红外探测器焦面阵列规模不断扩大，多层结构的低温热失配形变导致可靠性失效问题愈发突出，对焦面低温形变的定量化表征需求愈发迫切。本文基于大面阵长线列红外焦平面探测器冷箱组件展开焦面低温形变研究，针对多层结构粘接造成的低温形变进行了理论仿真；设计了一种90K探测器工作温度下焦面低温形变的测试方法，对比分析面形测试结果与仿真计算，低温下焦面整体下移，但变形曲线呈拱形，仿真得两边芯片向下凹约9.24μm；中间位置芯片下凹1.36μm；实验得两边芯片向下凹约40μm；中间位置芯片下凹10μm。数据差异与仿真材料参数设置有关。本文验证仿真结果的合理性，为大面阵长线列探测器焦面多层结构设计提供参考依据。 |
| 中文关键词:低温形变 理论仿真 面形测试 材料参数 红外焦平面探测器 |
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| Study on low temperature profile of ultra - long line infrared detector assembly |
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| Abstract:With the increasing scale of infrared detector focal plane array, the reliability failure problem caused by low-temperature thermal mismatch deformation of multi-layer structure becomes more prominent, and the need for quantitative characterization of low-temperature deformation of focal plane becomes more urgent. In this paper, the low temperature deformation of focal plane of cold box of infrared focal plane detector with large array and long line array is studied, and the low temperature deformation caused by bonding of multi-layer structure is simulated theoretically. A test method for low temperature deformation of the focal plane at 90K detector operating temperature was designed. The surface shape test results were compared with the simulation results. The focal plane moved down at low temperature, but the deformation curve was arched, and the simulation results showed that the chip on both sides concave down about 9.24μm. In the middle position, the chip is concave 1.36μm; The experimental results show that both chips are concave down about 40μm. In the middle position, the chip is concave 10μm. The data difference is related to the parameter setting of simulation material. This paper verifies the rationality of the simulation results, and provides a reference for the design of multi-layer focal plane structure of large array long line detector. |
| keywords:Low temperature deformation of focal plane The theory of the simulation The shape change of focal plane test Material parameters Infrared focal plane detector |
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