| 锑化铟红外探测器的微透镜阵列设计及试验 |
| 投稿时间：2022-11-21 修订日期：2022-11-30 点此下载全文 |
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| 中文摘要:锑化铟红外焦平面探测器工作在3-5 um波段,量子效率高。台面型探测器制作工艺简单,有较好的光学和电学隔离,但是填充因子较低,且随着像元尺寸的减小进一步降低。本文介绍了一种新型微透镜阵列的设计,并用于锑化铟红外探测器,提高其有效填充因子,降低串音。结果显示,探测器的串音降低26%，光响应提高22%。 |
| 中文关键词:红外焦平面探测器，锑化铟，微透镜阵列 |
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| Design and experiment of microlens array for InSb infrared detector |
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| Abstract:The InSb focal plane infrared detector works in the 3-5 um band with high quantum efficiency. The mesa-type InSb infrared focal plane array (IRFPA) detector typically has simple fabrication process, and it has good optical and electrical isolation. However, its fill factor is low, and will be lower with the pixel size smaller. In this paper, we present a new type of microlens array fabricated on the indium antimonide infrared detector to enhance its fill factor and debase its crosstalk. Results of experiments as follows, crosstalk debases 26% and signal response increases 22% can be achieved. |
| keywords:Focal plane infrared detector, InSb, Microlens array |
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