| ZnS红外窗口的电磁屏蔽设计及试验验证 |
| 投稿时间：2022-10-31 修订日期：2022-11-18 点此下载全文 |
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| 中文摘要:本文通过理论计算分析了金属网栅的电磁屏蔽特性和红外光学透射率之间的关系，得出了金属网栅的电学特性与光学特性是相背离的。为保证镀金属网栅后的光学镜片透过率下降小于等于5%，屏蔽效能大于30dB（频率范围：14kHz-18GHz）的要求，首先通过理论计算，得出选用线宽10um、周期单元的长度和宽度均为500um、膜层厚度1um的金属网栅（Ni-Ag）可满足要求。然后，采用直流磁控溅射镀制技术在φ100mm硫化锌基片表面成膜，经过曝光、显影、坚膜、腐蚀、剥离等工艺，最终获得镀Ni-AgFSS网栅的红外窗口样片。最后, 红外窗口样片经过透过率和屏蔽效能测试，测试结果满足设计要求。该计算数据可以预估光学窗口电磁屏蔽性能，为后续的设计工作提供参考。 |
| 中文关键词:电磁屏蔽 电磁防护 金属网栅 红外窗口 |
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| Electromagnetic Shielding Design and Experimental Verification of ZnS Infrared Window |
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| Abstract:In this paper, the relationship between the electromagnetic shielding characteristics and the infrared optical transmittance of the metal grid is analyzed through theoretical calculation, and it is concluded that the electrical characteristics of the metal grid are contrary to the optical characteristics. In order to ensure that the transmissivity of the optical lens after metal grid plating decreases by less than or equal to 5%, and the shielding effectiveness is greater than 30dB (frequency range: 14kHz-18GHz), first of all, through theoretical calculation, it is concluded that the metal grid (Ni-Ag) with a line width of 10um, a length and width of both periodic units of 500um, and a film thickness of 1um can meet the requirements. Then, the DC magnetron sputtering technology is used to Film is formed on the surface of φ100mm zinc sulfide substrate,after exposure, development, hardening, corrosion, stripping and other processes, finally obtain the infrared window sample of Ni AgFSS grid plating. Finally, the infrared window sample was tested for transmissivity and shielding effectiveness, and the test results met the design requirements. The calculated data can be used to predict the design requirements. The calculated data can be used to predict the electromagnetic shielding performance of the optical window and provide reference for the subsequent design work. |
| keywords:electromagnetic shielding, electromagnetic protection, metal mesh, infrared window |
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