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退火温度对二氧化钒薄膜红外透过率影响的研究
投稿时间:2009-01-17  最后修改时间:2009-01-17  点此下载全文
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作者单位E-mail
殷智勇 军械工程学院 xiaozangyu@sina.com 
中文摘要:针对提高溶胶凝胶法制备VO2薄膜的红外透过率的问题,提出制备时的最佳退火温度。简要介绍了无机溶胶凝胶法制备VO2薄膜过程,并对制备的VO2薄膜进行差示扫描量热(DSC)、X射线电子能谱仪(XPS)测试,分析VO2薄膜成分及相变温度。根据瑞利-高斯散射公式,通过散射截面与粒子密度计算和不同退火温度下薄膜透过率的测试,重点讨论退火温度、晶粒尺寸和红外透射率的三者的关系。
中文关键词:退火温度 相变 二氧化钒
 
Research on The Impact of Infrared Transmittance of VO2 Film at Different Anneal Temperature
Abstract:Considering the problem of enhancing infrared transmittance of VO2 film made by the method of inorganic Sol-Gel, the best anneal temperature is proposed. The function of making VO2 film process is brief. The element and phase transition temperature of VO2 film are analyzed with the test of DSC and XPS. According to Rayleigh-Gans formulation, with the calculation of scattering cross-section and particle density and the test of the optical property of VO2 film at different anneal temperature, the connection is analyzed about anneal temperature, crystallite size and infrared transmittance.
keywords:different anneal temperature VO2 phase transmittance
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