| 基于锑化铟合成及区熔的热场研究 |
| 投稿时间：2024-06-26 修订日期：2024-07-05 点此下载全文 |
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| 基金项目:装发项目(2006XX0003) |
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| 中文摘要:为了适应中波红外探测器的发展对锑化铟材料的需求,本文以锑化铟合成及区熔设备为研究对象,开展了锑化铟合成及区熔的热场研究。针对两步工艺研究了组合式热场结构,采用有限元仿真分析方法对热场进行数值模拟计算,得到了适宜工艺的温度分布及规律,经过工艺实验晶锭出现3-10cm的熔化区域,获得载流子浓度和迁移率满足要求的N型锑化铟锭条。研究的组合式及三段熔区的热场结构有效提高了材料制备的效率,降低了制造成本,研究结果表明,合成及区熔设备温度场分布符合设计要求,仿真结果为此类设备的优化与改进提供理论依据和有效手段,为红外探测器的发展提供材料制备基础。 |
| 中文关键词:锑化铟 有限元分析 合成 区熔提纯 热场 |
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| Thermal field Research Based on Synthesis of Indium Antimonide and Zone Melting |
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| Abstract:This article takes the synthesis of indium antimonide and zone melting equipment as the research object, analyzes the principles of indium antimonide synthesis and zone melting purification, proposes a combined thermal field design scheme for the two-step process, uses finite element simulation analysis software to numerically simulate the thermal field of the synthesis and zone melting process, analyzes the temperature distribution and variation rules, and obtains indium antimonide ingots that meet the performance requirements through synthesis and zone melting process experiments. The research results indicate that the temperature field distribution of the synthesis and zone melting equipment meets the design requirements, and the simulation results provide a theoretical basis and effective means for the optimization and improvement of such equipment. |
| keywords:Indium antimonide Finite element analysis Synthesis Zone melting purification Thermal field |
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