| 一种锑化铟红外焦平面探测器设计及制作 |
| 投稿时间：2024-04-24 修订日期：2024-06-07 点此下载全文 |
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| 中文摘要:本文报道了采用分立感光像元的锑化铟焦平面探测器的试验研究结果。制备了像素阵列为320×256,像元间距30μm的锑化铟红外探测器,测得响应均值441.112mV,噪声均值1.729mV,其阵列分立,缓解了裂片及串音问题,可靠性高,且填充率较高,制作工艺简单。 |
| 中文关键词:红外焦平面探测器，锑化铟，分立 |
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| Design and fabrication of an InSb infrared focal plane detector |
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| Abstract:In this paper, we present an new indium antimonide focal plane detector with discrete photosensitive pixels, implemented on a pixel array of 320×256 and a pixel pitch of 30 μm, the average response value was 441.112mV and the average noise value was 1.729mV. As unit cell array is discrete, it alleviates the problems of cracking and crosstalk. And it has high reliability, high filling rate, and simple fabrication process. |
| keywords:Focal plane infrared detector, InSb, discrete |
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